| Presentation | 1996/11/8 Preparation of Ba-Ferrite Thin Films by Post-annealing of The Film Deposited by Means of Alternate S Layer and R Layer Deposition Method H. Shimizu, H. Shinozaki, I. Uehara, S. Kon, Y. Hoshi, K. Kato, F. Kaneko, H. Ikawa, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | In this study, formation of hexagonal barium ferrite (BaM) thin films were attempted by post annealing of the films with a layered structure. The sample film was prepared as follows: Fe_3O_4 layer of 4.6Å thick and BaO・3Fe_2O_3 layer of 6.9Å thick were deposited 100 times on ZnO coated and non-coated thermally oxidized silicon wafer substrate at various temperatures. Annealing was performed at a temperature in the range from 600℃ to 800℃. The crystallization temperature of the film increased from 700℃ to 800℃ as the deposition temperature increase from 25℃ to 400℃. Orientation of crystallites in the film also depended on the deposition temperature and the BaM film with c-axis orientated texture was obtained by annealing the film deposited at 200℃. The orientation of the film however, depended little on the ZnO underlayer, although the film deposited on ZnO underlayer had a much higher coercive force than the film deposited on thermally oxidized silicon wafer substrate. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | barium ferrite / ZnO underlayer / substrate temperature / alternate deposition / orientation c-axis |
| Paper # | CPM96-113 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 1996/11/8(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Preparation of Ba-Ferrite Thin Films by Post-annealing of The Film Deposited by Means of Alternate S Layer and R Layer Deposition Method |
| Sub Title (in English) | |
| Keyword(1) | barium ferrite |
| Keyword(2) | ZnO underlayer |
| Keyword(3) | substrate temperature |
| Keyword(4) | alternate deposition |
| Keyword(5) | orientation c-axis |
| 1st Author's Name | H. Shimizu |
| 1st Author's Affiliation | Niigata University() |
| 2nd Author's Name | H. Shinozaki |
| 2nd Author's Affiliation | Tokyo Institute of Polytechnics |
| 3rd Author's Name | I. Uehara |
| 3rd Author's Affiliation | Tokyo Institute of Polytechnics |
| 4th Author's Name | S. Kon |
| 4th Author's Affiliation | Tokyo Institute of Polytechnics |
| 5th Author's Name | Y. Hoshi |
| 5th Author's Affiliation | Tokyo Institute of Polytechnics |
| 6th Author's Name | K. Kato |
| 6th Author's Affiliation | Niigata University |
| 7th Author's Name | F. Kaneko |
| 7th Author's Affiliation | Niigata University |
| 8th Author's Name | H. Ikawa |
| 8th Author's Affiliation | Kanagawa Institute of Technology |
| Date | 1996/11/8 |
| Paper # | CPM96-113 |
| Volume (vol) | vol.96 |
| Number (no) | 350 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |