| Presentation | 1996/11/8 Sputter-Deposition of Co films Under Complete Thermalization Conditions Kiyoshi ISHII, Masami KAWAZU, Hironori MINAMIDA, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | By utilizing forced Ar gas flow through a hollow cathode target, effective sputter-deposition of films is allowable even at 1-Torr range. The sputtered particles are completely thermalized by collisions with Ar gas before depositing onto the substrate. It has been found that Co films having a fine columnar structure with distinct grain boundaries are obtained at considerably high rates by this peculiar process. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | sputtering method / sputtered Film / gas-flow-sputtering / Co film |
| Paper # | CPM96-112 |
| Date of Issue |
| Conference Information | |
| Committee | CPM |
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| Conference Date | 1996/11/8(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Sputter-Deposition of Co films Under Complete Thermalization Conditions |
| Sub Title (in English) | |
| Keyword(1) | sputtering method |
| Keyword(2) | sputtered Film |
| Keyword(3) | gas-flow-sputtering |
| Keyword(4) | Co film |
| 1st Author's Name | Kiyoshi ISHII |
| 1st Author's Affiliation | Faculty of Engineering, Utsunomiya University() |
| 2nd Author's Name | Masami KAWAZU |
| 2nd Author's Affiliation | Faculty of Engineering, Utsunomiya University |
| 3rd Author's Name | Hironori MINAMIDA |
| 3rd Author's Affiliation | Faculty of Engineering, Utsunomiya University |
| Date | 1996/11/8 |
| Paper # | CPM96-112 |
| Volume (vol) | vol.96 |
| Number (no) | 350 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |