| Presentation | 1996/11/8 Development of nano-meter-size micro-technology using metal titanium Takashi Ono, Kouji Fujimaru, Hideki Matsumura, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | A new micro transistor (metal/insulator tunnel transistor; MITT) in which tunnel currents are controlled by a gate electrode has been already proposed. This paper is to present new micro-technology to realize such micro-transistor, MITT. In the technology, nano-meter-thick TiOx grown laterally at the edge of titanium thin film is utilized to draw patterns in a mask. Formation of metal/insulator/metal structure with only 100 nm-width insulator is succeeded by this new technology. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | super-micro-technology / nano-technology / MITT / Ti / TiOx / anodic oxidation |
| Paper # | CPM96-104 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 1996/11/8(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
| Secretary | |
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| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Development of nano-meter-size micro-technology using metal titanium |
| Sub Title (in English) | |
| Keyword(1) | super-micro-technology |
| Keyword(2) | nano-technology |
| Keyword(3) | MITT |
| Keyword(4) | Ti |
| Keyword(5) | TiOx |
| Keyword(6) | anodic oxidation |
| 1st Author's Name | Takashi Ono |
| 1st Author's Affiliation | School of Materials Science, Japan Advanced Institute of Science and Technology, Hokuriku() |
| 2nd Author's Name | Kouji Fujimaru |
| 2nd Author's Affiliation | School of Materials Science, Japan Advanced Institute of Science and Technology, Hokuriku |
| 3rd Author's Name | Hideki Matsumura |
| 3rd Author's Affiliation | School of Materials Science, Japan Advanced Institute of Science and Technology, Hokuriku |
| Date | 1996/11/8 |
| Paper # | CPM96-104 |
| Volume (vol) | vol.96 |
| Number (no) | 350 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |