| Presentation | 1996/10/25 Application of the Radiochemical Analytical Method to Material Science Masaaki KATOH, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The radiochemical analytical method is both accurate and high sensitive, and is one of the most important techniques for characterizing electronic materials. This paper provides several examples of the application of this method in the field of material science. These include the determination of ultra-trace elements in silicon single crystals by charged particle activation analysis and neutron activation analysis, the determination of impurities in a SiO_2/Si interface and the cross check of the trace analytical method for ultra-trace elements on silicon surfaces by neutron activation analysis. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | charged particle activation analysis / neutron activation analysis / substoichiometry / silicon |
| Paper # | CPM96-92 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 1996/10/25(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Application of the Radiochemical Analytical Method to Material Science |
| Sub Title (in English) | |
| Keyword(1) | charged particle activation analysis |
| Keyword(2) | neutron activation analysis |
| Keyword(3) | substoichiometry |
| Keyword(4) | silicon |
| 1st Author's Name | Masaaki KATOH |
| 1st Author's Affiliation | Project Team-1, NTT Science and Core Technology Laboratory Group() |
| Date | 1996/10/25 |
| Paper # | CPM96-92 |
| Volume (vol) | vol.96 |
| Number (no) | 329 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |