Presentation 1996/10/25
In-situ observation of crystal growth by electron beam heating in a TEM
Masato Tomita, Satoru Suzuki, Takayoshi Hayashi,
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Abstract(in English) The advantages of electron beam heating in a TEM are the rapid temperature increase/decrease, low-degas, and temperatures high enough to melt SiC, graphite particles. Furthermore, in-situ observation can provide controllability of the crystal growth. We used this electron beam heating to observe the growth process of amorphous boron filaments and the tubule formation. It is also shown that Si(111)7×7 surface reconstruction is formed on the nucleated Si- island under the intense electron beam irradiation.
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Keyword(in English) electron microscope / in-situ observation / electron beam heating / boron / silicon
Paper # CPM96-91
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Conference Information
Committee CPM
Conference Date 1996/10/25(1days)
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Registration To Component Parts and Materials (CPM)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) In-situ observation of crystal growth by electron beam heating in a TEM
Sub Title (in English)
Keyword(1) electron microscope
Keyword(2) in-situ observation
Keyword(3) electron beam heating
Keyword(4) boron
Keyword(5) silicon
1st Author's Name Masato Tomita
1st Author's Affiliation NTT Science and Core Technology Laboratory Group()
2nd Author's Name Satoru Suzuki
2nd Author's Affiliation NTT Science and Core Technology Laboratory Group
3rd Author's Name Takayoshi Hayashi
3rd Author's Affiliation NTT Integrated Information & Energy System Laboratories
Date 1996/10/25
Paper # CPM96-91
Volume (vol) vol.96
Number (no) 329
Page pp.pp.-
#Pages 6
Date of Issue