| Presentation | 1997/3/14 LSI test system for failure analysis Masaaki TANNO, Norio KUJI, Tadao TAKEDA, Shinji NAKAMURA, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We have developed a low-cost LSI test system for failure analysis in order to improve the analysis environment. This system has mainly the functions of Iddq-measurement and supplying test patterns for e-beam testing, light-emission microscopy, and liquid-crystal method. In addition, we developed the interchangeable fixture among failure analysis tools. We report the outline of this system and show an example of failure analysis using it. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | failure analysis / scan-path / e-beam testing / light-emission microscopy / liquid-crystal method / Iddq |
| Paper # | R96-49,CPM96-158 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 1997/3/14(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | LSI test system for failure analysis |
| Sub Title (in English) | |
| Keyword(1) | failure analysis |
| Keyword(2) | scan-path |
| Keyword(3) | e-beam testing |
| Keyword(4) | light-emission microscopy |
| Keyword(5) | liquid-crystal method |
| Keyword(6) | Iddq |
| 1st Author's Name | Masaaki TANNO |
| 1st Author's Affiliation | NTT System Electronics Laboratories() |
| 2nd Author's Name | Norio KUJI |
| 2nd Author's Affiliation | NTT System Electronics Laboratories |
| 3rd Author's Name | Tadao TAKEDA |
| 3rd Author's Affiliation | NTT System Electronics Laboratories |
| 4th Author's Name | Shinji NAKAMURA |
| 4th Author's Affiliation | NTT System Electronics Laboratories |
| Date | 1997/3/14 |
| Paper # | R96-49,CPM96-158 |
| Volume (vol) | vol.96 |
| Number (no) | 575 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |