| Presentation | 1997/3/6 Preparation of Hexagonal Ba-Ferrite Thin Films by Alternate Layer Deposition Method H. Shinozaki, Y. Hoshi, H. Shimizu, K. Katou, F. Kaneko, H. Ikawa, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | In this study, sputter-deposition of c-axis perpendicularly oriented hexagonal barium ferrite thin films was attempted by means of an alternate periodic deposition of S(Fe_3O_4) and R(BaFe_6O_<11>) layers. The thickness of the S and R layer was changed in the range from 2.3Å to 9.3Å and from 3.5Å to 13.9Å, respectively. All of the films obtained in this study had c axis orientation, although growth of crystallite in the film depends significantly on Ba content(thickness ratio of S layer to R layer) in the films. M type barium ferrite films with excellent c-axis orientation was obtained at a thickness of 4.6Å for S layer and 6.9Å for R layer, but growth of W type crystallites was not certified in the film deposited at a layer thickness of 9.3Å for S layer and 6.9Å for R layer. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | hexagonal barium ferrite / thin film / sputtering / altemate layer deposition method |
| Paper # | MR96-105,CPM96-146 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 1997/3/6(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Preparation of Hexagonal Ba-Ferrite Thin Films by Alternate Layer Deposition Method |
| Sub Title (in English) | |
| Keyword(1) | hexagonal barium ferrite |
| Keyword(2) | thin film |
| Keyword(3) | sputtering |
| Keyword(4) | altemate layer deposition method |
| 1st Author's Name | H. Shinozaki |
| 1st Author's Affiliation | Tokyo Institue of Polytechnics() |
| 2nd Author's Name | Y. Hoshi |
| 2nd Author's Affiliation | Tokyo Institue of Polytechnics |
| 3rd Author's Name | H. Shimizu |
| 3rd Author's Affiliation | Niigata University |
| 4th Author's Name | K. Katou |
| 4th Author's Affiliation | Niigata University |
| 5th Author's Name | F. Kaneko |
| 5th Author's Affiliation | Niigata University |
| 6th Author's Name | H. Ikawa |
| 6th Author's Affiliation | Kanagawa Institute of Technology |
| Date | 1997/3/6 |
| Paper # | MR96-105,CPM96-146 |
| Volume (vol) | vol.96 |
| Number (no) | 561 |
| Page | pp.pp.- |
| #Pages | 7 |
| Date of Issue | |