| Presentation | 1997/10/9 Structure dependence of GaN grown on Al_2O_3 c-face by ECR-MBE Yuui Shimizu, Tatsuya Tominari, Shingo Hokuto, Yasuo Chiba, Yasushi Nanishi, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | GaN epilayers were grown on (0001) sapphire by electron cyclotron resonance plasma excited molecular beam epitaxy (ECR-NBE). Hexagonal GaN which is a stable phase of GaN tends to grow on the sapphire c-face preferentially. It is also known, however, that cubic GaN grows on the same substrate when growth conditions such as temperature and V/III ratio are selected. In this letter, we report structural change due to substrate bias voltage which is applied to suppress the ion induced damages. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | ECR-MBE / cubic GaN / hexagonal GaN / V/III ratio / substrate bias |
| Paper # | CPM97-106-115 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 1997/10/9(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Structure dependence of GaN grown on Al_2O_3 c-face by ECR-MBE |
| Sub Title (in English) | |
| Keyword(1) | ECR-MBE |
| Keyword(2) | cubic GaN |
| Keyword(3) | hexagonal GaN |
| Keyword(4) | V/III ratio |
| Keyword(5) | substrate bias |
| 1st Author's Name | Yuui Shimizu |
| 1st Author's Affiliation | Graduate School of Science and Engineering, Ritsumeikan University() |
| 2nd Author's Name | Tatsuya Tominari |
| 2nd Author's Affiliation | Graduate School of Science and Engineering, Ritsumeikan University |
| 3rd Author's Name | Shingo Hokuto |
| 3rd Author's Affiliation | Graduate School of Science and Engineering, Ritsumeikan University |
| 4th Author's Name | Yasuo Chiba |
| 4th Author's Affiliation | Graduate School of Science and Engineering, Ritsumeikan University |
| 5th Author's Name | Yasushi Nanishi |
| 5th Author's Affiliation | Graduate School of Science and Engineering, Ritsumeikan University |
| Date | 1997/10/9 |
| Paper # | CPM97-106-115 |
| Volume (vol) | vol.97 |
| Number (no) | 307 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |