Presentation | 1997/8/21 Fabrication, Evaluation, and Analysis of Si/SiO_2 Sub-Micrometer 3D Photonic Crystals Shojiro KAWAKAMI, Osamu HANAIZUMI, Takashi SATO, Yasuo OHTERA, Takayuki KAWASHIMA, |
---|---|
PDF Download Page | PDF download Page Link |
Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | Sub-micrometer 3D periodic structures that consist of Si/SiO_2 rf-sputtered films are fabricated and optically evaluated. Fabricated 3D structure exhibited a photonic stopband ranged from λ=1.71μm to 2.06μm, which is clearly different from that of 1D periodic structures. We also demonstrate a preliminal analysis on the transmission characteristics of the 3D structures using FDTD(Finite-Difference Time-Domain) method. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | periodic structure / photonic bandgap / photonic crystal / sputter-etching / FDTD method |
Paper # | CPM97-74 |
Date of Issue |
Conference Information | |
Committee | CPM |
---|---|
Conference Date | 1997/8/21(1days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | |
Topics (in Japanese) | (See Japanese page) |
Topics (in English) | |
Chair | |
Vice Chair | |
Secretary | |
Assistant |
Paper Information | |
Registration To | Component Parts and Materials (CPM) |
---|---|
Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Fabrication, Evaluation, and Analysis of Si/SiO_2 Sub-Micrometer 3D Photonic Crystals |
Sub Title (in English) | |
Keyword(1) | periodic structure |
Keyword(2) | photonic bandgap |
Keyword(3) | photonic crystal |
Keyword(4) | sputter-etching |
Keyword(5) | FDTD method |
1st Author's Name | Shojiro KAWAKAMI |
1st Author's Affiliation | Research Institute of Electrical Communication, Tohoku University() |
2nd Author's Name | Osamu HANAIZUMI |
2nd Author's Affiliation | Research Institute of Electrical Communication, Tohoku University |
3rd Author's Name | Takashi SATO |
3rd Author's Affiliation | Research Institute of Electrical Communication, Tohoku University |
4th Author's Name | Yasuo OHTERA |
4th Author's Affiliation | Research Institute of Electrical Communication, Tohoku University |
5th Author's Name | Takayuki KAWASHIMA |
5th Author's Affiliation | Research Institute of Electrical Communication, Tohoku University |
Date | 1997/8/21 |
Paper # | CPM97-74 |
Volume (vol) | vol.97 |
Number (no) | 233 |
Page | pp.pp.- |
#Pages | 6 |
Date of Issue |