| Presentation | 1997/8/21 Fabrication of slant Si films and application to a walk-off polarizer with wide apertures Tomoyuki Aoyagi, Isamu Ito, Kazuo Shiraishi, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We fabricated Si films composed of slant microcolumns, and have obtained much larger beam-splitting angles. Previously, we fabricated Ta_2O_5 films with wide apertures and confirmed the principal operation as a walk-off polarizer, but the polarization-splitting angle was small. To attain the large polarization-splitting angle, we chose Si as the material of films. Films that have a microcolumnar orientation angle as large as 58° is obtained by evaporating Si at a large angle of vapor-beam incidence. The measured polarization-splitting angle of the sample is 20° at the wavelength 1.55μm, which is 3.5 times larger than that of rutile or calcite. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | walk-off polarizer / columnar structure / silicon / oblique deposition |
| Paper # | CPM97-72 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 1997/8/21(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Fabrication of slant Si films and application to a walk-off polarizer with wide apertures |
| Sub Title (in English) | |
| Keyword(1) | walk-off polarizer |
| Keyword(2) | columnar structure |
| Keyword(3) | silicon |
| Keyword(4) | oblique deposition |
| 1st Author's Name | Tomoyuki Aoyagi |
| 1st Author's Affiliation | Faculty of Engineering Utsunomiya University() |
| 2nd Author's Name | Isamu Ito |
| 2nd Author's Affiliation | SHINCRON Co., Ltd. |
| 3rd Author's Name | Kazuo Shiraishi |
| 3rd Author's Affiliation | Faculty of Engineering Utsunomiya University |
| Date | 1997/8/21 |
| Paper # | CPM97-72 |
| Volume (vol) | vol.97 |
| Number (no) | 233 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |