Presentation 1997/7/4
The New H-type LiTaO_3 Piezoelectric Gyroscope with High Sensitivity and Low Leakage Output
Noboru Wakatsuki, Hiroshi Tanaka, Masaaki Ono,
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Abstract(in English) In this paper, we experimentally demonstrate the new H-type LiTaO_3 piezoelectric gyroscope with high sensitivity and low leakage output. It consists of an upper fork, a long rectangular median coupler and a lower fork. The new arrangement succeeds to vibrate only an upper fork in f_x mode but to vibrate both upper and lower forks in f_z mode, due to the high electromechanical coefficient of LiTaO_3 crystal. The Q values of f_x and f_z modes are 20,000 and 6,000. The null signal due to the electrostatic leakage, the electromechanical leakage and mechanical leakage coupling, were suppressed totally less than -86dB. In spite of the Δ f=400Hz, the sensitivity went up to 0.1lmV/(°/sec) driven 1 V_ at 14.9kHz.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Piezoelectric vibratory gyroscope / Angular rate sensor / LiTaO_3 / Leakage coupling / New H-type resonator
Paper # CPM97-40
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Conference Information
Committee CPM
Conference Date 1997/7/4(1days)
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Registration To Component Parts and Materials (CPM)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) The New H-type LiTaO_3 Piezoelectric Gyroscope with High Sensitivity and Low Leakage Output
Sub Title (in English)
Keyword(1) Piezoelectric vibratory gyroscope
Keyword(2) Angular rate sensor
Keyword(3) LiTaO_3
Keyword(4) Leakage coupling
Keyword(5) New H-type resonator
1st Author's Name Noboru Wakatsuki
1st Author's Affiliation Department of Electronics and Materials, Faculty of Science and Engineering, Ishinomaki Senshu University()
2nd Author's Name Hiroshi Tanaka
2nd Author's Affiliation Department of Electronics and Materials, Faculty of Science and Engineering, Ishinomaki Senshu University
3rd Author's Name Masaaki Ono
3rd Author's Affiliation Susaka Plant, Fujitsu Ltd.
Date 1997/7/4
Paper # CPM97-40
Volume (vol) vol.97
Number (no) 150
Page pp.pp.-
#Pages 6
Date of Issue