Presentation 1993/7/29
Detection and discrimination of surface defects using a combined image inspection system.
Saburo Okada, Masaaki Imade, Hidekazu Miyauchi, Kazuya Takabatake,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) We have developed a new surface inspection system to detect various type of flaws and defects and also to discriminate kind and degrees of flaws.To realize such surface inspection,we combined the three dimensional shape measurement through laser beam scanning(beam chopping method)and the flaw and defect identification through diffraction light pattern analysis by the developed photo detecting sensor.This combination makes it possible to detect locations,sizes,kind and degrees of flaws and defects on undulating or stepped planar surfaces.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) surface inspection / laser diffraction pattern / laser chopping method / discrimination of flaws
Paper # IE93-35
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Conference Information
Committee IE
Conference Date 1993/7/29(1days)
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Paper Information
Registration To Image Engineering (IE)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Detection and discrimination of surface defects using a combined image inspection system.
Sub Title (in English)
Keyword(1) surface inspection
Keyword(2) laser diffraction pattern
Keyword(3) laser chopping method
Keyword(4) discrimination of flaws
1st Author's Name Saburo Okada
1st Author's Affiliation Gouernment Indnstritute,Chagoku()
2nd Author's Name Masaaki Imade
2nd Author's Affiliation Government Industrial Research Institute,Chugoku
3rd Author's Name Hidekazu Miyauchi
3rd Author's Affiliation Government Industrial Research Institute,Chugoku
4th Author's Name Kazuya Takabatake
4th Author's Affiliation Government Industrial Research Institute,Chugoku
Date 1993/7/29
Paper # IE93-35
Volume (vol) vol.93
Number (no) 176
Page pp.pp.-
#Pages 8
Date of Issue