Presentation | 1996/10/18 Development of Schottky Barrier Diode Mixer/Detectors in the THz Region T. Suzuki, T. Yasui, M. Arasawa, T. Nozokido, H. Fujishima, K. Mizuno, T. Yamada, |
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PDF Download Page | PDF download Page Link |
Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | GaAs Schottky diode (SBD) detector/mixers with low noise and high video sensitivity for the Terahertz region have been developed. To insure high performance of SBDs and reproducibility of the fabrication process, E-beam lithography, ECR plasma etching and annealing processes have been improved. Good performance of the diode as a detector/mixer with high S/N has been obtained and demonstrated in the THz region. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | Terahertz / Schottky barrier diode / ECR etching / annealing / 1/f noise |
Paper # | EMCL96-38,MW96-90 |
Date of Issue |
Conference Information | |
Committee | EMCJ |
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Conference Date | 1996/10/18(1days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | |
Topics (in Japanese) | (See Japanese page) |
Topics (in English) | |
Chair | |
Vice Chair | |
Secretary | |
Assistant |
Paper Information | |
Registration To | Electromagnetic Compatibility (EMCJ) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Development of Schottky Barrier Diode Mixer/Detectors in the THz Region |
Sub Title (in English) | |
Keyword(1) | Terahertz |
Keyword(2) | Schottky barrier diode |
Keyword(3) | ECR etching |
Keyword(4) | annealing |
Keyword(5) | 1/f noise |
1st Author's Name | T. Suzuki |
1st Author's Affiliation | Reseanch Institute of Electrical Communication, Tohoku University() |
2nd Author's Name | T. Yasui |
2nd Author's Affiliation | Photodynamics Research Center, The Institute of Physical and Chemical Research |
3rd Author's Name | M. Arasawa |
3rd Author's Affiliation | Research Institute of Electrical Communication, Tohoku University |
4th Author's Name | T. Nozokido |
4th Author's Affiliation | Photodynamics Research Center, The Institute of Physical and Chemical Research |
5th Author's Name | H. Fujishima |
5th Author's Affiliation | Photodynamics Research Center, The Institute of Physical and Chemical Research |
6th Author's Name | K. Mizuno |
6th Author's Affiliation | NTT Opto-electronics Laboratories |
7th Author's Name | T. Yamada |
7th Author's Affiliation | NTT Opto-electronics Laboratories |
Date | 1996/10/18 |
Paper # | EMCL96-38,MW96-90 |
Volume (vol) | vol.96 |
Number (no) | 314 |
Page | pp.pp.- |
#Pages | 6 |
Date of Issue |