Presentation 1996/10/18
Development of Schottky Barrier Diode Mixer/Detectors in the THz Region
T. Suzuki, T. Yasui, M. Arasawa, T. Nozokido, H. Fujishima, K. Mizuno, T. Yamada,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) GaAs Schottky diode (SBD) detector/mixers with low noise and high video sensitivity for the Terahertz region have been developed. To insure high performance of SBDs and reproducibility of the fabrication process, E-beam lithography, ECR plasma etching and annealing processes have been improved. Good performance of the diode as a detector/mixer with high S/N has been obtained and demonstrated in the THz region.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Terahertz / Schottky barrier diode / ECR etching / annealing / 1/f noise
Paper # EMCL96-38,MW96-90
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Conference Information
Committee EMCJ
Conference Date 1996/10/18(1days)
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Paper Information
Registration To Electromagnetic Compatibility (EMCJ)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Development of Schottky Barrier Diode Mixer/Detectors in the THz Region
Sub Title (in English)
Keyword(1) Terahertz
Keyword(2) Schottky barrier diode
Keyword(3) ECR etching
Keyword(4) annealing
Keyword(5) 1/f noise
1st Author's Name T. Suzuki
1st Author's Affiliation Reseanch Institute of Electrical Communication, Tohoku University()
2nd Author's Name T. Yasui
2nd Author's Affiliation Photodynamics Research Center, The Institute of Physical and Chemical Research
3rd Author's Name M. Arasawa
3rd Author's Affiliation Research Institute of Electrical Communication, Tohoku University
4th Author's Name T. Nozokido
4th Author's Affiliation Photodynamics Research Center, The Institute of Physical and Chemical Research
5th Author's Name H. Fujishima
5th Author's Affiliation Photodynamics Research Center, The Institute of Physical and Chemical Research
6th Author's Name K. Mizuno
6th Author's Affiliation NTT Opto-electronics Laboratories
7th Author's Name T. Yamada
7th Author's Affiliation NTT Opto-electronics Laboratories
Date 1996/10/18
Paper # EMCL96-38,MW96-90
Volume (vol) vol.96
Number (no) 314
Page pp.pp.-
#Pages 6
Date of Issue