Presentation 2000/11/10
Failure analysis system using extraction of killer function failure that has impact on yield
Fumihito Ohta, Yasukazu Mukogawa, Kouji Fukumoto, Youji Mashiko,
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Abstract(in English) Memory devices have redundant circuits. Part of the failures can be repaired within the range of the ability to replace redundant circuits. We have developed the failure analysis system using automatic extraction of the killer function failure that has an impact on yield of memory devices. In this system, all failures can be separated into the killer function failures that cannot be repaired and the others. Applying this system to the 64Mbits memory, we confirmed that the rate of each killer function failure mode could be estimated. Therefore, we have established the effective system for failure analysis of memory devices.
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Keyword(in English) yield / memory device / killer function failure / redundant circuit / fail bit map
Paper # R2000-24
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Conference Date 2000/11/10(1days)
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Language JPN
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Title (in English) Failure analysis system using extraction of killer function failure that has impact on yield
Sub Title (in English)
Keyword(1) yield
Keyword(2) memory device
Keyword(3) killer function failure
Keyword(4) redundant circuit
Keyword(5) fail bit map
1st Author's Name Fumihito Ohta
1st Author's Affiliation ULSI Development Center, Evaluation & Analysis Department, Mitsubishi Electric Corporation()
2nd Author's Name Yasukazu Mukogawa
2nd Author's Affiliation ULSI Development Center, Evaluation & Analysis Department, Mitsubishi Electric Corporation
3rd Author's Name Kouji Fukumoto
3rd Author's Affiliation ULSI Development Center, Evaluation & Analysis Department, Mitsubishi Electric Corporation
4th Author's Name Youji Mashiko
4th Author's Affiliation ULSI Development Center, Evaluation & Analysis Department, Mitsubishi Electric Corporation
Date 2000/11/10
Paper # R2000-24
Volume (vol) vol.100
Number (no) 445
Page pp.pp.-
#Pages 6
Date of Issue