Presentation 2000/11/10
Hot Carrier Degradation of p^+ Polysilicon Gated pMOSFETs
M. Fujimoto, T. Nakajima, S. Nakano,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) Through the investigation of the hot carrier degradation of p^+ polysilicon gated pMOSFETs at three kinds of stress condition, which are Igmax, Isubmax and CHC stress, the following mechanism was found. At Igmax stress condition, Ids and gm increase due to the drain avalanche hot electron injection. At Isubmax stress condition, Ids and gm increase due to the drain avalanche hot electron injection at the first time and decrease due to the drain avalanche hot hole injection. At CHC stress condition, Ids and gm decrease due to the channel hot hole injection. From these results, there are three hot carrier degradation of pMOSFETs. The relationship between the hot carrier lifetime and the stress voltage is different at three stress conditions. So It is necessary to study the stress voltage dependence of hot carrier lifetime at all stress condit ion to predict the accurate hot carrier lifetime.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) hot carrier / pMOSFETs / p^+ Polysilicon gate
Paper # R2000-23
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Conference Information
Committee R
Conference Date 2000/11/10(1days)
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Registration To Reliability(R)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Hot Carrier Degradation of p^+ Polysilicon Gated pMOSFETs
Sub Title (in English)
Keyword(1) hot carrier
Keyword(2) pMOSFETs
Keyword(3) p^+ Polysilicon gate
1st Author's Name M. Fujimoto
1st Author's Affiliation Quality Laboratory, Semiconductor Company, Matsushita Electronics Corporation()
2nd Author's Name T. Nakajima
2nd Author's Affiliation Quality Laboratory, Semiconductor Company, Matsushita Electronics Corporation
3rd Author's Name S. Nakano
3rd Author's Affiliation Quality Laboratory, Semiconductor Company, Matsushita Electronics Corporation
Date 2000/11/10
Paper # R2000-23
Volume (vol) vol.100
Number (no) 445
Page pp.pp.-
#Pages 6
Date of Issue