Presentation 1995/11/10
Development of high density package by stacking IC chips
Katsunobu Mori, Hiroyuki Nakanishi, Atsuya Narai, Toshiya Ishio, Satoru Fukunaga, kazuya Fujita, Morihiro Kada,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) Stacked Chips Package containing two IC chips in it has been developed. Most of the conventional packaging materials can be used for this technology and the existing production equipments can also be utilized without making assembly process more complicated. This package structure employs to mount each IC chip onto the both sides of a die pad. Having such structure, normally the passivation layer on the surface of the IC chip is easily damaged during the production. However, such problem has been overcome by forming a protective coating on the surface of the IC chip and attaching the stress absorbing material on the jig which is in contact with the surface the chip. The same reliability level as convetional IC package has been achieved.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Stacking IC chip / High density Package / Protective coating on the surface / Stress absorbing material
Paper # R95-20
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Conference Information
Committee R
Conference Date 1995/11/10(1days)
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Paper Information
Registration To Reliability(R)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Development of high density package by stacking IC chips
Sub Title (in English)
Keyword(1) Stacking IC chip
Keyword(2) High density Package
Keyword(3) Protective coating on the surface
Keyword(4) Stress absorbing material
1st Author's Name Katsunobu Mori
1st Author's Affiliation Production Engineering Dept. VLSI Development Laboratories Tenri Integrated Circuits Group, Sharp Corporation()
2nd Author's Name Hiroyuki Nakanishi
2nd Author's Affiliation Production Engineering Dept. VLSI Development Laboratories Tenri Integrated Circuits Group, Sharp Corporation
3rd Author's Name Atsuya Narai
3rd Author's Affiliation Production Engineering Dept. VLSI Development Laboratories Tenri Integrated Circuits Group, Sharp Corporation
4th Author's Name Toshiya Ishio
4th Author's Affiliation Production Engineering Dept. VLSI Development Laboratories Tenri Integrated Circuits Group, Sharp Corporation
5th Author's Name Satoru Fukunaga
5th Author's Affiliation Production Engineering Dept. VLSI Development Laboratories Tenri Integrated Circuits Group, Sharp Corporation
6th Author's Name kazuya Fujita
6th Author's Affiliation Production Engineering Dept. VLSI Development Laboratories Tenri Integrated Circuits Group, Sharp Corporation
7th Author's Name Morihiro Kada
7th Author's Affiliation Production Engineering Dept. VLSI Development Laboratories Tenri Integrated Circuits Group, Sharp Corporation
Date 1995/11/10
Paper # R95-20
Volume (vol) vol.95
Number (no) 348
Page pp.pp.-
#Pages 6
Date of Issue