Presentation 2002/9/13
A Method of Evaluation of the Performance of RC Element in IC
Noriaki SATO, Masanori KAWAMOTO, Fumihito ITO, Hiroshi INOUE,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) When an analog PLL circuit is implemented in IC, it should be considered that how the passive elements are actually in specification and what the dispersion of the values and the influence to the performance to the designed IC are. So, the measurements of the performances on R and C elements in an IC, in which the simple test element groups (TEG) are made, are evaluated. The use of the laser trimming makes us simply the separation and the measurement for the individual elements in TEG. The fundamental characteristics of Rs and Cs in IC were evaluated by these measurements.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) IC / R_TEG / C_TEG / Laser Trimming / Performance Evaluation
Paper # EMD2002-47
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Committee EMD
Conference Date 2002/9/13(1days)
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Registration To Electromechanical Devices (EMD)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) A Method of Evaluation of the Performance of RC Element in IC
Sub Title (in English)
Keyword(1) IC
Keyword(2) R_TEG
Keyword(3) C_TEG
Keyword(4) Laser Trimming
Keyword(5) Performance Evaluation
1st Author's Name Noriaki SATO
1st Author's Affiliation Faculty of Engineering and Resource Science, AKITA University()
2nd Author's Name Masanori KAWAMOTO
2nd Author's Affiliation Faculty of Engineering and Resource Science, AKITA University
3rd Author's Name Fumihito ITO
3rd Author's Affiliation Akita Electronics Systems CO.,LTD.
4th Author's Name Hiroshi INOUE
4th Author's Affiliation Faculty of Engineering and Resource Science, AKITA University
Date 2002/9/13
Paper # EMD2002-47
Volume (vol) vol.102
Number (no) 325
Page pp.pp.-
#Pages 6
Date of Issue