| Presentation | 2001/9/20 A New Application of DMD to Photolithography and Rapid Prototyping System K. Takahashi, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The digital micromirror device(DMD)is a new display device fabricated by the micro machining technique and used in projectors. In this paper, the DMD serves as an ultraviolet exposure system and is tested in applications for pojection exposure systems and rapid prototyping. In the system, the DMD and a mercury lamp are used as a pattern generator and an UV source, respectively. Since the developed exposure system doesn't need a mask or LASER, a simple and low cost system can be realized. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | DMD / rapid prototyping / micro machining / photolithography / artificial heart / micro-electrophoretic chip |
| Paper # | EMD2001-53 |
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| Conference Information | |
| Committee | EMD |
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| Conference Date | 2001/9/20(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Electromechanical Devices (EMD) |
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| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | A New Application of DMD to Photolithography and Rapid Prototyping System |
| Sub Title (in English) | |
| Keyword(1) | DMD |
| Keyword(2) | rapid prototyping |
| Keyword(3) | micro machining |
| Keyword(4) | photolithography |
| Keyword(5) | artificial heart |
| Keyword(6) | micro-electrophoretic chip |
| 1st Author's Name | K. Takahashi |
| 1st Author's Affiliation | Department of Electrical and Electronic Systems, Faculty of Engineering, Saitama University() |
| Date | 2001/9/20 |
| Paper # | EMD2001-53 |
| Volume (vol) | vol.101 |
| Number (no) | 326 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |