| Presentation | 2001/6/29 Observation of Semiconductor Bonded Films on Piezoelectric substrates by X-Ray diffraction Ken-ichiro Miyadai, Tsutomu Nakajima, Yusuke Aoki, Kohji Hohkawa, |
|---|---|
| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Surface acoustic wave (SAW) -semiconductor coupled devices are attractive for realization of high performance and new functional devices. In this paper, we show a process technology for fabrication of SAW-semiconductor coupled device. Especially, we examined a stress of bonded semiconductor films, which were heated to obtain strong bonding strength between a semiconductor films and piezoeloctric substrate, by X-ray diffraction method. We clarified the stress distribution of GaAs bonded films. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | ELO film bonding / SAW device / GaAs / heating process / stress distribution |
| Paper # | US2001-27,EMD2001-19,CPM2001-34,OME2001-29 |
| Date of Issue |
| Conference Information | |
| Committee | EMD |
|---|---|
| Conference Date | 2001/6/29(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Electromechanical Devices (EMD) |
|---|---|
| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Observation of Semiconductor Bonded Films on Piezoelectric substrates by X-Ray diffraction |
| Sub Title (in English) | |
| Keyword(1) | ELO film bonding |
| Keyword(2) | SAW device |
| Keyword(3) | GaAs |
| Keyword(4) | heating process |
| Keyword(5) | stress distribution |
| 1st Author's Name | Ken-ichiro Miyadai |
| 1st Author's Affiliation | Kanagawa Institute of Technology() |
| 2nd Author's Name | Tsutomu Nakajima |
| 2nd Author's Affiliation | Kanagawa Institute of Technology |
| 3rd Author's Name | Yusuke Aoki |
| 3rd Author's Affiliation | Kanagawa Institute of Technology |
| 4th Author's Name | Kohji Hohkawa |
| 4th Author's Affiliation | Kanagawa Institute of Technology |
| Date | 2001/6/29 |
| Paper # | US2001-27,EMD2001-19,CPM2001-34,OME2001-29 |
| Volume (vol) | vol.101 |
| Number (no) | 169 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |