| Presentation | 2000/8/18 EMD2000-43 / CPM2000-58 / OPE2000-55 / LQE2000-49 Fabrication of low loss laminated polarization splitters comprising consists of poly-silicon and silica layers Haruhiko HORIE, Kouichi MURO, Hidehiko YODA, Kazuo SHIRAISHI, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We investigated the fabrication process for low-loss laminated polarization splitters that consist of alternately laminated poly-Si and silica layers having a beam-splitting angle of more than 20゜. Deposition conditions in the rf sputtering process, such as substrate temperature, film thickness per layer, and Ar gas pressure are investigated. We found the optimum deposition condition that serves to reduce losses due to absorption and scattering. As the result, alow-loss multilayer film that has an optical loss of 0.24dB/100μm has been obtained. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | laminated polarization splitters / poly-silicon / multilayer films / sputtering |
| Paper # | EMD2000-43,CPM2000-58,OPE2000-55,LQE2000-49 |
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| Conference Information | |
| Committee | EMD |
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| Conference Date | 2000/8/18(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Electromechanical Devices (EMD) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | EMD2000-43 / CPM2000-58 / OPE2000-55 / LQE2000-49 Fabrication of low loss laminated polarization splitters comprising consists of poly-silicon and silica layers |
| Sub Title (in English) | |
| Keyword(1) | laminated polarization splitters |
| Keyword(2) | poly-silicon |
| Keyword(3) | multilayer films |
| Keyword(4) | sputtering |
| 1st Author's Name | Haruhiko HORIE |
| 1st Author's Affiliation | Faculty of Engineering, Utsunomiya University() |
| 2nd Author's Name | Kouichi MURO |
| 2nd Author's Affiliation | Faculty of Engineering, Utsunomiya University |
| 3rd Author's Name | Hidehiko YODA |
| 3rd Author's Affiliation | Faculty of Engineering, Utsunomiya University |
| 4th Author's Name | Kazuo SHIRAISHI |
| 4th Author's Affiliation | Faculty of Engineering, Utsunomiya University |
| Date | 2000/8/18 |
| Paper # | EMD2000-43,CPM2000-58,OPE2000-55,LQE2000-49 |
| Volume (vol) | vol.100 |
| Number (no) | 258 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |