Presentation 1999/5/21
Dielectric Multilayer Thin Film Fabrication Process and The Application for Optical Telecommunication
Kazuhiko Ito, Mitsuo Ukechi, Noboru Uehara, Satoshi Hirayama, Norihiko Nakamura, Takuya Miyashita, Hiroyuki Sasaki, Koutaro Watase,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) It is well known that ion or fast atom beam sputter processes have low deposition rate but they can fabricate low loss optical films. And they are low temperature processes. We are developing dielectric multilayer devices for optical telecommunication using the beam sputter processes. The multilayer WDM filters were directly deposited onto the optical connectors or the optical waveguides Low insertion loss and high reliability results were obtained.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Dielectric multilayer films / Beam sputter processes / Optical connectors / Optical waveguides
Paper # EMD99-6
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Conference Information
Committee EMD
Conference Date 1999/5/21(1days)
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Paper Information
Registration To Electromechanical Devices (EMD)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Dielectric Multilayer Thin Film Fabrication Process and The Application for Optical Telecommunication
Sub Title (in English)
Keyword(1) Dielectric multilayer films
Keyword(2) Beam sputter processes
Keyword(3) Optical connectors
Keyword(4) Optical waveguides
1st Author's Name Kazuhiko Ito
1st Author's Affiliation Central Research Laboratory, Japan Aviation Electronics Industry, Ltd.()
2nd Author's Name Mitsuo Ukechi
2nd Author's Affiliation Central Research Laboratory, Japan Aviation Electronics Industry, Ltd.
3rd Author's Name Noboru Uehara
3rd Author's Affiliation Central Research Laboratory, Japan Aviation Electronics Industry, Ltd.
4th Author's Name Satoshi Hirayama
4th Author's Affiliation Central Research Laboratory, Japan Aviation Electronics Industry, Ltd.
5th Author's Name Norihiko Nakamura
5th Author's Affiliation Central Research Laboratory, Japan Aviation Electronics Industry, Ltd.
6th Author's Name Takuya Miyashita
6th Author's Affiliation Central Research Laboratory, Japan Aviation Electronics Industry, Ltd.
7th Author's Name Hiroyuki Sasaki
7th Author's Affiliation Optoelectronics Development Division, Japan Aviation Electronics Industry, Ltd.
8th Author's Name Koutaro Watase
8th Author's Affiliation Optoelectronics Development Division, Japan Aviation Electronics Industry, Ltd.
Date 1999/5/21
Paper # EMD99-6
Volume (vol) vol.99
Number (no) 77
Page pp.pp.-
#Pages 6
Date of Issue