Presentation 1998/7/3
SAW gas sensor using sensing film with porous structure
K. Koh, Y. Sato, A. Sato, T. Eguchi, T. Homma, K. Hohkawa,
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Abstract(in English) Suface acoustic wave(SAW)devices, are effectively used as highly functional and highly sensitive chemical sensors which identify unknown or target materials in gasses and liquids.We present the results of a basic study on applying porous film of rubber materials and alumina as the sensing films of the SAW sensors.We made several films with several films with different adhesive natures natures by bonding reactive materials on the rubber films and alumina film.The results verified the feasibility of these materials used as sensing films of the SAW sensors.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Surface acoustic wave device / gas sensor / rubber material / alumina / catalytic effect
Paper # US98-32,EMD98-24,CPM98-56,OME98-54
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Conference Information
Committee EMD
Conference Date 1998/7/3(1days)
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Registration To Electromechanical Devices (EMD)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) SAW gas sensor using sensing film with porous structure
Sub Title (in English)
Keyword(1) Surface acoustic wave device
Keyword(2) gas sensor
Keyword(3) rubber material
Keyword(4) alumina
Keyword(5) catalytic effect
1st Author's Name K. Koh
1st Author's Affiliation Faculty of Engineering, Kanagawa Institute of Technology()
2nd Author's Name Y. Sato
2nd Author's Affiliation Faculty of Engineering, Kanagawa Institute of Technology
3rd Author's Name A. Sato
3rd Author's Affiliation Faculty of Engineering, Kanagawa Institute of Technology
4th Author's Name T. Eguchi
4th Author's Affiliation Faculty of Engineering, Kanagawa Institute of Technology
5th Author's Name T. Homma
5th Author's Affiliation Faculty of Engineering, Kanagawa Institute of Technology
6th Author's Name K. Hohkawa
6th Author's Affiliation Faculty of Engineering, Kanagawa Institute of Technology
Date 1998/7/3
Paper # US98-32,EMD98-24,CPM98-56,OME98-54
Volume (vol) vol.98
Number (no) 162
Page pp.pp.-
#Pages 6
Date of Issue