| Presentation | 1998/7/3 Measurement of thermal conductivity of Si ion-implanted GaAs using photoacoustic technique Nobuya TAKABATAKE, Takeshi KOBAYASHI, Syuji KAWAHATA, Tomio IZUMI, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | A photoacoustic method is proposed to measure the thermal conductivity of semiconducting thin films.The method is applied to a disordered layer in GaAs produced by Si ion implantation and annealing behavior of the thermal conductivity of the layer is measured.The thermal conductivity is recovered rapidly at an annealing temperature above 500 ℃ and is reached to 55Wm^<-1>K^<-1>, the value of GaAs at 800℃ |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Thermal conductivity / Thin film / Photoacoustic technique / PAS |
| Paper # | US98-30,EMD98-22,CPM98-54,OME98-52 |
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| Conference Information | |
| Committee | EMD |
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| Conference Date | 1998/7/3(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Assistant | |
| Paper Information | |
| Registration To | Electromechanical Devices (EMD) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Measurement of thermal conductivity of Si ion-implanted GaAs using photoacoustic technique |
| Sub Title (in English) | |
| Keyword(1) | Thermal conductivity |
| Keyword(2) | Thin film |
| Keyword(3) | Photoacoustic technique |
| Keyword(4) | PAS |
| 1st Author's Name | Nobuya TAKABATAKE |
| 1st Author's Affiliation | Dept.Electrical and Electronic Eng., KANAGAWA Institute of Technology() |
| 2nd Author's Name | Takeshi KOBAYASHI |
| 2nd Author's Affiliation | Dept.Electrical and Electronic Eng., KANAGAWA Institute of Technology |
| 3rd Author's Name | Syuji KAWAHATA |
| 3rd Author's Affiliation | Dept.Electronic Eng., TOKAI Uni. |
| 4th Author's Name | Tomio IZUMI |
| 4th Author's Affiliation | Dept.Electronic Eng., TOKAI Uni. |
| Date | 1998/7/3 |
| Paper # | US98-30,EMD98-22,CPM98-54,OME98-52 |
| Volume (vol) | vol.98 |
| Number (no) | 162 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |