| Presentation | 1998/8/28 Fabrication of PLC Platform in a Planar Process Using Plastic Waveguide H. Tabuchi, T. Naruse, G. Nakagawa, H. Nakata, K. Tanaka, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We developed a technology for an all-planar fabrication process of PLC platform that use plastic waveguide. We achieved this with the following methods : The first method is electrodes formation prior to waveguide formation. This method takes advantage of the low temperature of the plastic waveguide formation process. The second method is forming a pedestal by embedding a mask and performing RIE with O_2. This takes advantage of the high selectivity of metal against plastic. We demonstrated the use of the fabricated platform for achieving an optical coupling between laser diode and waveguide. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | waveguide / plastic / PLC platform / optical hybrid integration / planar process |
| Paper # | EMD98-55,CPM98-103,OPE98-76,LQE98-70 |
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| Conference Information | |
| Committee | EMD |
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| Conference Date | 1998/8/28(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Electromechanical Devices (EMD) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Fabrication of PLC Platform in a Planar Process Using Plastic Waveguide |
| Sub Title (in English) | |
| Keyword(1) | waveguide |
| Keyword(2) | plastic |
| Keyword(3) | PLC platform |
| Keyword(4) | optical hybrid integration |
| Keyword(5) | planar process |
| 1st Author's Name | H. Tabuchi |
| 1st Author's Affiliation | FUJITSU LABORATORIES LTD.() |
| 2nd Author's Name | T. Naruse |
| 2nd Author's Affiliation | FUJITSU LABORATORIES LTD. |
| 3rd Author's Name | G. Nakagawa |
| 3rd Author's Affiliation | FUJITSU LABORATORIES LTD. |
| 4th Author's Name | H. Nakata |
| 4th Author's Affiliation | FUJITSU LABORATORIES LTD. |
| 5th Author's Name | K. Tanaka |
| 5th Author's Affiliation | FUJITSU LABORATORIES LTD. |
| Date | 1998/8/28 |
| Paper # | EMD98-55,CPM98-103,OPE98-76,LQE98-70 |
| Volume (vol) | vol.98 |
| Number (no) | 250 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |