| Presentation | 1998/12/18 Servo Accelerometer Using Piezoelectric Bimorph Actuator of LiNbO_3 Single Crystal Hideki Yokoyama, Atsushi Yamamoto, Subaru Kudo, Noboru Wakatsuki, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The potential benefits of piezoelectric bimorph actuator are their simplified structure, faster response, and relatively large displacement. A LiNbO_3 crystal plate is produced in oppositely-polarized layers with heated slightly below the Curie temperature, and the LiNbO_3 bimorph can show no hysteresis and no creep. We study the actuator of the oppositely-polarized 140° rotated Y plate. Its size is 30×10×0.2(mm). The fundamental characteristics of the actuator were electrically and optically measured and analyzed by FEM and equivalent circuit model. For the servo accelerometer, the additional mass, the integrated displacement sensor and the feedback circuit were examined to increase the sensitivity. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | LiNbO_3 / Piezoelectric Actuator / Servo Accelerometer |
| Paper # | EMD98-78 |
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| Conference Information | |
| Committee | EMD |
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| Conference Date | 1998/12/18(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
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| Paper Information | |
| Registration To | Electromechanical Devices (EMD) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Servo Accelerometer Using Piezoelectric Bimorph Actuator of LiNbO_3 Single Crystal |
| Sub Title (in English) | |
| Keyword(1) | LiNbO_3 |
| Keyword(2) | Piezoelectric Actuator |
| Keyword(3) | Servo Accelerometer |
| 1st Author's Name | Hideki Yokoyama |
| 1st Author's Affiliation | Department of Electronics and Materials, Faculty of science and Engineering, Ishinomaki-Senshu University() |
| 2nd Author's Name | Atsushi Yamamoto |
| 2nd Author's Affiliation | Department of Electronics and Materials, Faculty of science and Engineering, Ishinomaki-Senshu University |
| 3rd Author's Name | Subaru Kudo |
| 3rd Author's Affiliation | Department of Electronics and Materials, Faculty of science and Engineering, Ishinomaki-Senshu University |
| 4th Author's Name | Noboru Wakatsuki |
| 4th Author's Affiliation | Department of Electronics and Materials, Faculty of science and Engineering, Ishinomaki-Senshu University |
| Date | 1998/12/18 |
| Paper # | EMD98-78 |
| Volume (vol) | vol.98 |
| Number (no) | 494 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |