| Presentation | 1994/8/19 Suppression of Increase in Optical Loss of Magnetooptical Crystal (LuNdBi)_3(FeAl)_5O_12> due to sputter-etching Hideki Yokoi, Tetsuya Mizumoto, Kazuki Kozakai, Yoshiyuki Naito, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | A waveguide optical isolator based on nonreciprocal phase shift has the advantage of not needing phase matching and complicated magnetization control.Magnetic garnet films of composition(LuNdBi)_ 3(FeAl)_5O_12>(LNB)for this isolator exhibit large propagation loss when rib waveguide is formed on the film using Ar sputter- etching process.In this paper,increase in the optical absorption loss of LNB films is discussed.Fabrication process of rib waveguides is investigated to suppress the loss increase.Straight.- rib waveguides and branching device,a component of the isolator, are fabricated and examined. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | optical isolator / rib waveguide / X-ray photoelectron spectroscopy / reactive ion etching |
| Paper # | EMD94-40,CPM94-54,OPE94-49 |
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| Conference Information | |
| Committee | EMD |
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| Conference Date | 1994/8/19(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Electromechanical Devices (EMD) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Suppression of Increase in Optical Loss of Magnetooptical Crystal (LuNdBi)_3(FeAl)_5O_12> due to sputter-etching |
| Sub Title (in English) | |
| Keyword(1) | optical isolator |
| Keyword(2) | rib waveguide |
| Keyword(3) | X-ray photoelectron spectroscopy |
| Keyword(4) | reactive ion etching |
| 1st Author's Name | Hideki Yokoi |
| 1st Author's Affiliation | Faculty of Engineering,Tokyo Institute of Technology() |
| 2nd Author's Name | Tetsuya Mizumoto |
| 2nd Author's Affiliation | Faculty of Engineering,Tokyo Institute of Technology |
| 3rd Author's Name | Kazuki Kozakai |
| 3rd Author's Affiliation | Faculty of Engineering,Tokyo Institute of Technology |
| 4th Author's Name | Yoshiyuki Naito |
| 4th Author's Affiliation | Faculty of Engineering,Tokyo Institute of Technology |
| Date | 1994/8/19 |
| Paper # | EMD94-40,CPM94-54,OPE94-49 |
| Volume (vol) | vol.94 |
| Number (no) | 195 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |