Presentation 1994/8/19
Fabrication and evaluation of PD array module
Chikara Sakurai, Gohji Nakagawa, Kazunori Miura, Naoki Yamamoto, Masao Makiuchi, Mitsuhiro Yano,
PDF Download Page PDF download Page Link
Abstract(in Japanese) (See Japanese page)
Abstract(in English) Photodiode array module was realized by utilizing YAG welding techniques.Flip-chip Planar InGaAs, InP p-i-n photodiode array with a back-illuminated structure and six channel Photodiode- regions were integrated on a single chip.Lateral misalignment between photodiode and fiber arrays at the stage of laser welding was less than 8μm,which is negligibly small as compared with coupl ing torelance of 64μm.Photo-sensitivity was from 0.95-0.96(A/W) fo r six channels.Reproducibility and uniformity was confirmed for photodiode array module by laser welding tecniques.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) photodiode array module / YAG welding tecniques / tolerance / photo-sensitivity
Paper # EMD94-28,CPM94-42,OPE94-37
Date of Issue

Conference Information
Committee EMD
Conference Date 1994/8/19(1days)
Place (in Japanese) (See Japanese page)
Place (in English)
Topics (in Japanese) (See Japanese page)
Topics (in English)
Chair
Vice Chair
Secretary
Assistant

Paper Information
Registration To Electromechanical Devices (EMD)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Fabrication and evaluation of PD array module
Sub Title (in English)
Keyword(1) photodiode array module
Keyword(2) YAG welding tecniques
Keyword(3) tolerance
Keyword(4) photo-sensitivity
1st Author's Name Chikara Sakurai
1st Author's Affiliation Fujitsu Laboratories()
2nd Author's Name Gohji Nakagawa
2nd Author's Affiliation Fujitsu Laboratories
3rd Author's Name Kazunori Miura
3rd Author's Affiliation Fujitsu Laboratories
4th Author's Name Naoki Yamamoto
4th Author's Affiliation Fujitsu Laboratories
5th Author's Name Masao Makiuchi
5th Author's Affiliation Fujitsu Laboratories
6th Author's Name Mitsuhiro Yano
6th Author's Affiliation Fujitsu Laboratories
Date 1994/8/19
Paper # EMD94-28,CPM94-42,OPE94-37
Volume (vol) vol.94
Number (no) 195
Page pp.pp.-
#Pages 6
Date of Issue