| Presentation | 1993/8/27 Miniature Two-dimensional Optical Sensor Using Silicon Micromachined Optical Scanner Hiroshi Goto, Masaaki Ikeda, Masahiro Yoneda, Koichi Imanaka, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We have developed a miniature two-dimensional optical scanner, fabricated by silicon micromachining technology,driven by a piezoelectric micro actuator.The scanner has the capability of two- dimensional and wide range optical scanning.With,this scanner, actualizing the two-dimensional optical sensor and the object recognition at twodimensional area is capable. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Optical Scanner / Piezoelectric Actuator / Micro-Machining / Two-dimensional / Silicon |
| Paper # | EMD93-47,CPM93-60,OQE93-81 |
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| Conference Information | |
| Committee | EMD |
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| Conference Date | 1993/8/27(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Electromechanical Devices (EMD) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Miniature Two-dimensional Optical Sensor Using Silicon Micromachined Optical Scanner |
| Sub Title (in English) | |
| Keyword(1) | Optical Scanner |
| Keyword(2) | Piezoelectric Actuator |
| Keyword(3) | Micro-Machining |
| Keyword(4) | Two-dimensional |
| Keyword(5) | Silicon |
| 1st Author's Name | Hiroshi Goto |
| 1st Author's Affiliation | Central R&D Laboratry,OMRON Corporation() |
| 2nd Author's Name | Masaaki Ikeda |
| 2nd Author's Affiliation | Central R&D Laboratry,OMRON Corporation |
| 3rd Author's Name | Masahiro Yoneda |
| 3rd Author's Affiliation | Central R&D Laboratry,OMRON Corporation |
| 4th Author's Name | Koichi Imanaka |
| 4th Author's Affiliation | Central R&D Laboratry,OMRON Corporation |
| Date | 1993/8/27 |
| Paper # | EMD93-47,CPM93-60,OQE93-81 |
| Volume (vol) | vol.93 |
| Number (no) | 200 |
| Page | pp.pp.- |
| #Pages | 7 |
| Date of Issue | |