| Presentation | 1995/6/16 Thermally controlled magnetization microrelay fabricated by nickel surface micromachining Etsu Hashimoto, Yuji Uenishi, Akinori Watabe, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Requirement of miniaturizing and integrating mechanical devices, such as relays, is increasing because of telecommunication society development. Micromachining has been studied as the technology for realizing on-chip micromechanical devices, microrelays, however, have not appeared because micromachining is not suitable for making a magnetic coil structure. We have proposed a coil free magnetic actuator : a thermally controlled magnetization actuator (TCMA) whose actuation is based on reducing the magnetization by local heating. The TCMA microrelay of 2mm^2 has been fabricated by a planar process technology with nickel surface micromachining. In this paper, we explain the principle, the fabrication method and the generated force of the microrelay. An integrated thin film heater could heat to reduce nickel's magnetization, and the microrelay was operated with 50Hz switching motion. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | microrelay / nickel plating / micromachining / thermally controlled magnetization actuator |
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| Conference Information | |
| Committee | EMD |
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| Conference Date | 1995/6/16(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Registration To | Electromechanical Devices (EMD) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Thermally controlled magnetization microrelay fabricated by nickel surface micromachining |
| Sub Title (in English) | |
| Keyword(1) | microrelay |
| Keyword(2) | nickel plating |
| Keyword(3) | micromachining |
| Keyword(4) | thermally controlled magnetization actuator |
| 1st Author's Name | Etsu Hashimoto |
| 1st Author's Affiliation | NTT Interdisciplinary Research Laboratories() |
| 2nd Author's Name | Yuji Uenishi |
| 2nd Author's Affiliation | NTT Interdisciplinary Research Laboratories |
| 3rd Author's Name | Akinori Watabe |
| 3rd Author's Affiliation | NTT Interdisciplinary Research Laboratories |
| Date | 1995/6/16 |
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| Volume (vol) | vol.95 |
| Number (no) | 93 |
| Page | pp.pp.- |
| #Pages | 6 |
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