| Presentation | 1996/11/15 Metallizaition Technique for Aluminum Nitride KAZUTAKA SASAKI, MASUHIRO NATSUHARA, HIDENORI NAKANISHI, TOMOJI GOTO, HIROHIKO NAKATA, MASAAKI TOBIOKA, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Recently, as the semiconductor devices generate(emit) much heat due to their higher integration and power consumption, higher thermal conductivity is needed for the substrate of these devices. As the termal conductivity of Aluminum Nitride is ten times as high as that of Aluminum Oxide, it is suitable for the substrate of these high heat generating semiconductor devices. We will show you our technology of metallization on Aluminum Nitride, that is key technology for ceramic substrate. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Aluminium / Nitride / Metallization / Cofire |
| Paper # | EMD96-74 |
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| Conference Information | |
| Committee | EMD |
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| Conference Date | 1996/11/15(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Electromechanical Devices (EMD) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Metallizaition Technique for Aluminum Nitride |
| Sub Title (in English) | |
| Keyword(1) | Aluminium |
| Keyword(2) | Nitride |
| Keyword(3) | Metallization |
| Keyword(4) | Cofire |
| 1st Author's Name | KAZUTAKA SASAKI |
| 1st Author's Affiliation | Advanced Electronic Materials and Parts R&D Department Itami Research Laboratories SUMITOMO EIECTRIC INDUSTRIES, LTD.() |
| 2nd Author's Name | MASUHIRO NATSUHARA |
| 2nd Author's Affiliation | Advanced Electronic Materials and Parts R&D Department Itami Research Laboratories SUMITOMO EIECTRIC INDUSTRIES, LTD. |
| 3rd Author's Name | HIDENORI NAKANISHI |
| 3rd Author's Affiliation | Advanced Electronic Materials and Parts R&D Department Itami Research Laboratories SUMITOMO EIECTRIC INDUSTRIES, LTD. |
| 4th Author's Name | TOMOJI GOTO |
| 4th Author's Affiliation | Advanced Electronic Materials and Parts R&D Department Itami Research Laboratories SUMITOMO EIECTRIC INDUSTRIES, LTD. |
| 5th Author's Name | HIROHIKO NAKATA |
| 5th Author's Affiliation | Advanced Electronic Materials and Parts R&D Department Itami Research Laboratories SUMITOMO EIECTRIC INDUSTRIES, LTD. |
| 6th Author's Name | MASAAKI TOBIOKA |
| 6th Author's Affiliation | Advanced Electronic Materials and Parts R&D Department Itami Research Laboratories SUMITOMO EIECTRIC INDUSTRIES, LTD. |
| Date | 1996/11/15 |
| Paper # | EMD96-74 |
| Volume (vol) | vol.96 |
| Number (no) | 363 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |