| Presentation | 1996/10/18 Tribological Characteristics of Unhydrogenated and Hydrogenated Amorphous Carbon Films Prepared by ECR Sputtering S. Umemura, S. Hirono, Y. Andoh, R. Kaneko, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | To clarify the tribological characteristics of unhydrogenated and hydrogenated amorphous carbon films, Raman spectroscopic analysis, resistivity measurements, and scanning-scratched wear tests were conducted for amorphous carbon films deposited by ECR sputtering by using an AFM/FFM. The results are as follows: (1) The unhydrogenated carbon films showed high wear-resistance characteristics comparable to diamond. (2) Hydrogenation of amorphous carbon films resulted in wear resistance degradation and it was caused by the polymerization of amorphous carbon films. (3) The wear-resistance characteristics of unhydrogenated carbon films is attributed to randomly assembled graphite. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | carbon / film / wear / tribology / ECR / AFM |
| Paper # | EMD96-64 |
| Date of Issue |
| Conference Information | |
| Committee | EMD |
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| Conference Date | 1996/10/18(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Electromechanical Devices (EMD) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Tribological Characteristics of Unhydrogenated and Hydrogenated Amorphous Carbon Films Prepared by ECR Sputtering |
| Sub Title (in English) | |
| Keyword(1) | carbon |
| Keyword(2) | film |
| Keyword(3) | wear |
| Keyword(4) | tribology |
| Keyword(5) | ECR |
| Keyword(6) | AFM |
| 1st Author's Name | S. Umemura |
| 1st Author's Affiliation | NTT Integrated Information and Energy System Laboratories() |
| 2nd Author's Name | S. Hirono |
| 2nd Author's Affiliation | NTT Integrated Information and Energy System Laboratories |
| 3rd Author's Name | Y. Andoh |
| 3rd Author's Affiliation | NTT Integrated Information and Energy System Laboratories |
| 4th Author's Name | R. Kaneko |
| 4th Author's Affiliation | Faculty of System Engineering, Wakayama University |
| Date | 1996/10/18 |
| Paper # | EMD96-64 |
| Volume (vol) | vol.96 |
| Number (no) | 318 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |