| Presentation | 1996/4/19 Trend of Micromachine Technology R&D Tokio Kitahara, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The ninth IEEE Workshop on MEMS(Micro Electro Mechanical Systems) had been held in San Diego last February. A recent trend of micromachine technology R&D is infered from the contents of the reports at the workshop. The MITI's "Micromachine Technology R&D Project" started at 1991 reached to a midterm point of the 10-year R&D schedule. The results of the project for past five years are introduced. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Micromachine / Microfabrication / Micromachining / Microactuator / Microsensor / Micromechanism |
| Paper # | EMD-96-5 |
| Date of Issue |
| Conference Information | |
| Committee | EMD |
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| Conference Date | 1996/4/19(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Electromechanical Devices (EMD) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Trend of Micromachine Technology R&D |
| Sub Title (in English) | |
| Keyword(1) | Micromachine |
| Keyword(2) | Microfabrication |
| Keyword(3) | Micromachining |
| Keyword(4) | Microactuator |
| Keyword(5) | Microsensor |
| Keyword(6) | Micromechanism |
| 1st Author's Name | Tokio Kitahara |
| 1st Author's Affiliation | Advanced Machinery Department, Mechanical Engineering Laboratory, AIST, MITI() |
| Date | 1996/4/19 |
| Paper # | EMD-96-5 |
| Volume (vol) | vol.96 |
| Number (no) | 14 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |