| Presentation | 1997/10/17 Wear Properties of Metallic Film on ceramic Prepared by Ion Beam Assisted evaporation Ichiro TAKANO, Masafumi NAYA, Satoshi SAWADA, Yoshio SAWADA, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Improvement of adhesive property between ceramics and metallic films is performed by changing composition of the interface between ceramics and films. In this paper, mixing layer at the interface between SiC substrates and Mo films was formed using Ar^+ ion beam with an energy of 10keV. Ar^+ ions played an important role to knock Mo atoms into the SiC substrate. The films prepared by Ar^+ ion beam assisted evaporation showed larger wear-resistance than that of the film prepared without Ar^+ ion beam assist. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | ion beam assisted evaporation / Mo film / SiC / wear resistance / adhesive property |
| Paper # | EMD97-62 |
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| Conference Information | |
| Committee | EMD |
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| Conference Date | 1997/10/17(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Electromechanical Devices (EMD) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Wear Properties of Metallic Film on ceramic Prepared by Ion Beam Assisted evaporation |
| Sub Title (in English) | |
| Keyword(1) | ion beam assisted evaporation |
| Keyword(2) | Mo film |
| Keyword(3) | SiC |
| Keyword(4) | wear resistance |
| Keyword(5) | adhesive property |
| 1st Author's Name | Ichiro TAKANO |
| 1st Author's Affiliation | Kogakuin University, Department of Electrical Engineering() |
| 2nd Author's Name | Masafumi NAYA |
| 2nd Author's Affiliation | Kogakuin University, Department of Electrical Engineering |
| 3rd Author's Name | Satoshi SAWADA |
| 3rd Author's Affiliation | Kogakuin University, Department of Electrical Engineering |
| 4th Author's Name | Yoshio SAWADA |
| 4th Author's Affiliation | Kogakuin University, Department of Electrical Engineering |
| Date | 1997/10/17 |
| Paper # | EMD97-62 |
| Volume (vol) | vol.97 |
| Number (no) | 329 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |