Presentation | 1997/8/22 Development of the Si V-groove substrate for optical fiber communication Ryoji Kaku, Takuya Maezawa, Kiyoshi Takayama, Mitsutoshi Sato, Ayumi Takahashi, Tadashi Harada, |
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PDF Download Page | PDF download Page Link |
Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | We have developed the Si V-groove substrate for surface mounted type optical modules. The most important key word id "The consistency of the low-cost and the high accuracy" in this market. We had the enough accuracy ±0.5μm of the V-groove width and the metal marker pattern, and ~0μm of the relative position between a V-groove center and a metal marker on the production level. We confirmed that the Si V-groove substrate is very useful for low-cost optical modules using passive alignment. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | Silicon V-groove / Passive alignment / Low cost / High accuracy / Optical module / Anisotropic etching |
Paper # | EMD97-45,CPM97-83,OPE97-61,LQE97-57 |
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Conference Information | |
Committee | EMD |
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Conference Date | 1997/8/22(1days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | |
Topics (in Japanese) | (See Japanese page) |
Topics (in English) | |
Chair | |
Vice Chair | |
Secretary | |
Assistant |
Paper Information | |
Registration To | Electromechanical Devices (EMD) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Development of the Si V-groove substrate for optical fiber communication |
Sub Title (in English) | |
Keyword(1) | Silicon V-groove |
Keyword(2) | Passive alignment |
Keyword(3) | Low cost |
Keyword(4) | High accuracy |
Keyword(5) | Optical module |
Keyword(6) | Anisotropic etching |
1st Author's Name | Ryoji Kaku |
1st Author's Affiliation | Japan Aviation Electronics Industry, Limited Central Research Laboratory() |
2nd Author's Name | Takuya Maezawa |
2nd Author's Affiliation | Japan Aviation Electronics Industry, Limited Central Research Laboratory |
3rd Author's Name | Kiyoshi Takayama |
3rd Author's Affiliation | Japan Aviation Electronics Industry, Limited Central Research Laboratory |
4th Author's Name | Mitsutoshi Sato |
4th Author's Affiliation | Japan Aviation Electronics Industry, Limited Central Research Laboratory |
5th Author's Name | Ayumi Takahashi |
5th Author's Affiliation | Japan Aviation Electronics Industry, Limited Central Research Laboratory |
6th Author's Name | Tadashi Harada |
6th Author's Affiliation | Japan Aviation Electronics Industry, Limited Optoelectronics Development Division |
Date | 1997/8/22 |
Paper # | EMD97-45,CPM97-83,OPE97-61,LQE97-57 |
Volume (vol) | vol.97 |
Number (no) | 232 |
Page | pp.pp.- |
#Pages | 6 |
Date of Issue |