Presentation | 1997/7/4 MEASUREMENT OF THE THERMAL DIFFUSIVITY OF THIN FILMS BY PHOTOACOUSTIC METHOD Nobuya TAKABATAKE, Takeshi KOBAYASHI, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | New measurement methods to determine the thermal diffusivity of thin films without measuring heat characteristics of substrates have been proposed in this paper. We propose two kinds of methods for the measurement of thermal diffusivity of thin film: one for thin film that is placed in contact with the front surface of substrate, and the other for thin film that is placed in contact with he rear surface of substance. It was confirmed that measured values of he thermal diffusivity agreed reasonably with the reported values in the literature. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | Thermal diffusivity / Thin film / Measurement method / Photoacoustic method / PAS |
Paper # | EMD97-25 |
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Committee | EMD |
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Conference Date | 1997/7/4(1days) |
Place (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Electromechanical Devices (EMD) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | MEASUREMENT OF THE THERMAL DIFFUSIVITY OF THIN FILMS BY PHOTOACOUSTIC METHOD |
Sub Title (in English) | |
Keyword(1) | Thermal diffusivity |
Keyword(2) | Thin film |
Keyword(3) | Measurement method |
Keyword(4) | Photoacoustic method |
Keyword(5) | PAS |
1st Author's Name | Nobuya TAKABATAKE |
1st Author's Affiliation | Dept. Electronic and Electrical Eng., KANAGAWA Institute of Technology() |
2nd Author's Name | Takeshi KOBAYASHI |
2nd Author's Affiliation | Dept. Electronic and Electrical Eng., KANAGAWA Institute of Technology |
Date | 1997/7/4 |
Paper # | EMD97-25 |
Volume (vol) | vol.97 |
Number (no) | 149 |
Page | pp.pp.- |
#Pages | 6 |
Date of Issue |