Presentation 1997/7/4
MEASUREMENT OF THE THERMAL DIFFUSIVITY OF THIN FILMS BY PHOTOACOUSTIC METHOD
Nobuya TAKABATAKE, Takeshi KOBAYASHI,
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Abstract(in English) New measurement methods to determine the thermal diffusivity of thin films without measuring heat characteristics of substrates have been proposed in this paper. We propose two kinds of methods for the measurement of thermal diffusivity of thin film: one for thin film that is placed in contact with the front surface of substrate, and the other for thin film that is placed in contact with he rear surface of substance. It was confirmed that measured values of he thermal diffusivity agreed reasonably with the reported values in the literature.
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Keyword(in English) Thermal diffusivity / Thin film / Measurement method / Photoacoustic method / PAS
Paper # EMD97-25
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Committee EMD
Conference Date 1997/7/4(1days)
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Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) MEASUREMENT OF THE THERMAL DIFFUSIVITY OF THIN FILMS BY PHOTOACOUSTIC METHOD
Sub Title (in English)
Keyword(1) Thermal diffusivity
Keyword(2) Thin film
Keyword(3) Measurement method
Keyword(4) Photoacoustic method
Keyword(5) PAS
1st Author's Name Nobuya TAKABATAKE
1st Author's Affiliation Dept. Electronic and Electrical Eng., KANAGAWA Institute of Technology()
2nd Author's Name Takeshi KOBAYASHI
2nd Author's Affiliation Dept. Electronic and Electrical Eng., KANAGAWA Institute of Technology
Date 1997/7/4
Paper # EMD97-25
Volume (vol) vol.97
Number (no) 149
Page pp.pp.-
#Pages 6
Date of Issue