| Presentation | 1997/7/4 Ultrasonic Properties of PZT Thin Films in UHF-SHF Ranges Ryota Nanjo, Ken-ya Hashimoto, Masatsune Yamaguchi, Naoyuki Hanajima, Syuji Tsutsumi, Tadashi Yonezawa, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Study of piezoelectricity and ultrasonic properties was done for PZT films of 0.22 to 2.65μm thickness prepared by sol gel method. First, bulk wave transducers were fabricated employing the PZT films deposited on a Si substrate, and their transducer performances based on thickness-longitudinal vibration were measured. Ultrasonic pulse echo trains were clearly observed with the bias voltage of 30V. The minimum conversion loss reached 3.8dB at 1.75GHz. Next, an SAW delay line employing the PZT film was fabricated on a sapphire substrate. With the bias voltage of 30V, the responses which may be attributed to SAWs were observed. The possibility of developing SAW devices on Si substrates and bulk wave PZT film/Si diaphragm resonator was also experimentally discussed. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | PZT Sol gel method / Ultrasonic transducer / Surface acoustic wave / Thin-film bulk-wave resonator |
| Paper # | EMD97-24 |
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| Conference Information | |
| Committee | EMD |
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| Conference Date | 1997/7/4(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Electromechanical Devices (EMD) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Ultrasonic Properties of PZT Thin Films in UHF-SHF Ranges |
| Sub Title (in English) | |
| Keyword(1) | PZT Sol gel method |
| Keyword(2) | Ultrasonic transducer |
| Keyword(3) | Surface acoustic wave |
| Keyword(4) | Thin-film bulk-wave resonator |
| 1st Author's Name | Ryota Nanjo |
| 1st Author's Affiliation | Dept. of Electrical and Electronics Engineering, Chiba University() |
| 2nd Author's Name | Ken-ya Hashimoto |
| 2nd Author's Affiliation | Dept. of Electrical and Electronics Engineering, Chiba University |
| 3rd Author's Name | Masatsune Yamaguchi |
| 3rd Author's Affiliation | Dept. of Electrical and Electronics Engineering, Chiba University |
| 4th Author's Name | Naoyuki Hanajima |
| 4th Author's Affiliation | Central Research Institute, Mitsubishi Material Corporation |
| 5th Author's Name | Syuji Tsutsumi |
| 5th Author's Affiliation | Central Research Institute, Mitsubishi Material Corporation |
| 6th Author's Name | Tadashi Yonezawa |
| 6th Author's Affiliation | Central Research Institute, Mitsubishi Material Corporation |
| Date | 1997/7/4 |
| Paper # | EMD97-24 |
| Volume (vol) | vol.97 |
| Number (no) | 149 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |