Presentation 1997/7/4
The applications of PZT thin film deposited by hydrothermal methods
Takeshi MORITA, Takefumi KANDA, Minoru KUROSAWA, Toshiro HIGUCHI,
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Abstract(in English) This paper proposes the applications using PZT thin film deposited by hydrothermal method. Hydrothermal method utilizes the chemical reaction between titanium base metal and the ions melted in the solution at high temperature. So curved shaped base metals are available. We have succeeded in fabricating micro ultrasonic motor and tactile sensors by hydrothermal method. The motor dimension is 2.4mm in diameter and 10mm long. The output torque was 7μNm and the maximum revolution speed was 880 rpm at 15Vp-p driving voltage. The sensor is 27.8mm long. Its resonance frequency is 115kHz. We have succeeded in sensing contact and the resolution is 1μm.
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Keyword(in English) Hydrothermal method / PZT thin film / micro ultrasonic motor / tactile sensor
Paper # EMD97-23
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Committee EMD
Conference Date 1997/7/4(1days)
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Registration To Electromechanical Devices (EMD)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) The applications of PZT thin film deposited by hydrothermal methods
Sub Title (in English)
Keyword(1) Hydrothermal method
Keyword(2) PZT thin film
Keyword(3) micro ultrasonic motor
Keyword(4) tactile sensor
1st Author's Name Takeshi MORITA
1st Author's Affiliation The Univ. of Tokyo, Fact. of Engineering, Dep. of Precision Machinery Eng.()
2nd Author's Name Takefumi KANDA
2nd Author's Affiliation The Univ. of Tokyo, Fact. of Engineering, Dep. of Precision Machinery Eng.
3rd Author's Name Minoru KUROSAWA
3rd Author's Affiliation The Univ. of Tokyo, Fact. of Engineering, Dep. of Precision Machinery Eng.
4th Author's Name Toshiro HIGUCHI
4th Author's Affiliation The Univ. of Tokyo, Fact. of Engineering, Dep. of Precision Machinery Eng.
Date 1997/7/4
Paper # EMD97-23
Volume (vol) vol.97
Number (no) 149
Page pp.pp.-
#Pages 6
Date of Issue