Presentation 1997/4/18
Comb-drive Nickel Micromirror Fabricated by Nickel Surface Micromachining
Koji Akimoto, Yuji Uenishi, Kazuharu Honma, Shinji Nagaoka,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) A nickel micromirror which is fabricated by a nickel micromachining on a silicon wafer can be actuated by comb-drive actuators widely and precisely. As an optical characteristic, reflectance of the nickel micromirror is measured by using a hemi-spherical-end fiber, and it is estimated to be 63%. As mechanical characteristics, a displacement and a resonance frequency are measured by using a micro resonator which is constructed by a flat-end fiber facet and the micromirror as two parallel mirrors. The obtained maximum displacement was more than 10μm, and the resonance frequency was 1.4kHz, which are sufficient for the nickel micromirror to apply the tunable optical devices.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Nickel surface micromachining / Micromirror / Comb-drive actuator / Etalon / Optical measurement
Paper # EMD97-3
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Conference Information
Committee EMD
Conference Date 1997/4/18(1days)
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Paper Information
Registration To Electromechanical Devices (EMD)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Comb-drive Nickel Micromirror Fabricated by Nickel Surface Micromachining
Sub Title (in English)
Keyword(1) Nickel surface micromachining
Keyword(2) Micromirror
Keyword(3) Comb-drive actuator
Keyword(4) Etalon
Keyword(5) Optical measurement
1st Author's Name Koji Akimoto
1st Author's Affiliation NTT Opto-electronics Laboratories()
2nd Author's Name Yuji Uenishi
2nd Author's Affiliation NTT Opto-electronics Laboratories
3rd Author's Name Kazuharu Honma
3rd Author's Affiliation NTT Advanced Technology
4th Author's Name Shinji Nagaoka
4th Author's Affiliation NTT Opto-electronics Laboratories
Date 1997/4/18
Paper # EMD97-3
Volume (vol) vol.97
Number (no) 12
Page pp.pp.-
#Pages 6
Date of Issue