| Presentation | 1997/4/18 Comb-drive Nickel Micromirror Fabricated by Nickel Surface Micromachining Koji Akimoto, Yuji Uenishi, Kazuharu Honma, Shinji Nagaoka, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | A nickel micromirror which is fabricated by a nickel micromachining on a silicon wafer can be actuated by comb-drive actuators widely and precisely. As an optical characteristic, reflectance of the nickel micromirror is measured by using a hemi-spherical-end fiber, and it is estimated to be 63%. As mechanical characteristics, a displacement and a resonance frequency are measured by using a micro resonator which is constructed by a flat-end fiber facet and the micromirror as two parallel mirrors. The obtained maximum displacement was more than 10μm, and the resonance frequency was 1.4kHz, which are sufficient for the nickel micromirror to apply the tunable optical devices. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Nickel surface micromachining / Micromirror / Comb-drive actuator / Etalon / Optical measurement |
| Paper # | EMD97-3 |
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| Conference Information | |
| Committee | EMD |
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| Conference Date | 1997/4/18(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Electromechanical Devices (EMD) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Comb-drive Nickel Micromirror Fabricated by Nickel Surface Micromachining |
| Sub Title (in English) | |
| Keyword(1) | Nickel surface micromachining |
| Keyword(2) | Micromirror |
| Keyword(3) | Comb-drive actuator |
| Keyword(4) | Etalon |
| Keyword(5) | Optical measurement |
| 1st Author's Name | Koji Akimoto |
| 1st Author's Affiliation | NTT Opto-electronics Laboratories() |
| 2nd Author's Name | Yuji Uenishi |
| 2nd Author's Affiliation | NTT Opto-electronics Laboratories |
| 3rd Author's Name | Kazuharu Honma |
| 3rd Author's Affiliation | NTT Advanced Technology |
| 4th Author's Name | Shinji Nagaoka |
| 4th Author's Affiliation | NTT Opto-electronics Laboratories |
| Date | 1997/4/18 |
| Paper # | EMD97-3 |
| Volume (vol) | vol.97 |
| Number (no) | 12 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |