Presentation 1997/4/18
Actuators and their Applications
Hiroyuki Fujita, Hiroshi Toshiyoshi,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) Driving principles, configurations and applications of micromachined actuators are reviewed. Examples include (1)an optical matrix switch composed of arrayed torsional micromirrors which are driven by electrostatic force, (2)a microactuator using thin film shape memory alloy (TiNi), (3)a microactuator for scanning a microwave antenna, and (4)self-assembly of three-dimensional microstructures by scratch drive microactuators. A system architecture, an autonomous distributed micro system, is proposed to make best use of micromechatronic technology.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) micromachines / optical switch / shape memory alloy / microwave / three-dimensional microstructures / autonomous distributed systems
Paper # EMD97-1
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Conference Information
Committee EMD
Conference Date 1997/4/18(1days)
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Place (in English)
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Paper Information
Registration To Electromechanical Devices (EMD)
Language ENG
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Actuators and their Applications
Sub Title (in English)
Keyword(1) micromachines
Keyword(2) optical switch
Keyword(3) shape memory alloy
Keyword(4) microwave
Keyword(5) three-dimensional microstructures
Keyword(6) autonomous distributed systems
1st Author's Name Hiroyuki Fujita
1st Author's Affiliation Institute of Industrial Science, The University of Tokyo()
2nd Author's Name Hiroshi Toshiyoshi
2nd Author's Affiliation Institute of Industrial Science, The University of Tokyo
Date 1997/4/18
Paper # EMD97-1
Volume (vol) vol.97
Number (no) 12
Page pp.pp.-
#Pages 6
Date of Issue