Presentation | 1997/4/18 Actuators and their Applications Hiroyuki Fujita, Hiroshi Toshiyoshi, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | Driving principles, configurations and applications of micromachined actuators are reviewed. Examples include (1)an optical matrix switch composed of arrayed torsional micromirrors which are driven by electrostatic force, (2)a microactuator using thin film shape memory alloy (TiNi), (3)a microactuator for scanning a microwave antenna, and (4)self-assembly of three-dimensional microstructures by scratch drive microactuators. A system architecture, an autonomous distributed micro system, is proposed to make best use of micromechatronic technology. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | micromachines / optical switch / shape memory alloy / microwave / three-dimensional microstructures / autonomous distributed systems |
Paper # | EMD97-1 |
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Conference Information | |
Committee | EMD |
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Conference Date | 1997/4/18(1days) |
Place (in Japanese) | (See Japanese page) |
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Topics (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Electromechanical Devices (EMD) |
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Language | ENG |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Actuators and their Applications |
Sub Title (in English) | |
Keyword(1) | micromachines |
Keyword(2) | optical switch |
Keyword(3) | shape memory alloy |
Keyword(4) | microwave |
Keyword(5) | three-dimensional microstructures |
Keyword(6) | autonomous distributed systems |
1st Author's Name | Hiroyuki Fujita |
1st Author's Affiliation | Institute of Industrial Science, The University of Tokyo() |
2nd Author's Name | Hiroshi Toshiyoshi |
2nd Author's Affiliation | Institute of Industrial Science, The University of Tokyo |
Date | 1997/4/18 |
Paper # | EMD97-1 |
Volume (vol) | vol.97 |
Number (no) | 12 |
Page | pp.pp.- |
#Pages | 6 |
Date of Issue |