| Presentation | 2001/6/20 An Electro-optic Microprobe for Internal-node Waveform Measurement of GHz LSI's Mitsuru Shinagawa, Chisato Hashimoto, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | This paper describes an electro-optic (EO) microprobe for measuring internal-node waveform of GHz LSI's. The system has spatial resolution of less than 2μm and bandwidth of 4.5 GHz. The probe can measure GHz signal on sub-micron line by testing-pad with FIB technology. The probe has been successfully applied to waveform measurement of a GHz communication LSI. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | electro-optic effect / laser diode / photonics / electro-optic sampling / LSI testing / internal-node waveform measurement / FIB |
| Paper # | MW2001-44,OPE2001-31 |
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| Conference Information | |
| Committee | MW |
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| Conference Date | 2001/6/20(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Microwaves (MW) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | An Electro-optic Microprobe for Internal-node Waveform Measurement of GHz LSI's |
| Sub Title (in English) | |
| Keyword(1) | electro-optic effect |
| Keyword(2) | laser diode |
| Keyword(3) | photonics |
| Keyword(4) | electro-optic sampling |
| Keyword(5) | LSI testing |
| Keyword(6) | internal-node waveform measurement |
| Keyword(7) | FIB |
| 1st Author's Name | Mitsuru Shinagawa |
| 1st Author's Affiliation | NTT Telecommunications Energy Laboratories() |
| 2nd Author's Name | Chisato Hashimoto |
| 2nd Author's Affiliation | NTT Electronics Corporation |
| Date | 2001/6/20 |
| Paper # | MW2001-44,OPE2001-31 |
| Volume (vol) | vol.101 |
| Number (no) | 137 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |