| Presentation | 1999/1/20 Device Characterization of Semi-Insulating GaAs Substrate Grown by Vertical Boat Method for Ion-Implantation Process Masaki Yanagisawa, Shigeru Nakajima, Takashi Sakurada, Makoto Kiyama, Shin-ichi Sawada, Ryusuke Nakai, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The Vertical Boat(VB)method has advantages for manufacturring large diameter GaAs substrates, because of its low dislocation density and small residual strain. The electrical characterization of devices fabricated on VB GaAs substrates was demonstrated in this work. The VB substrate shows the same or better properties compared with the LEC substrate. We conclude that the VB GaAs substrate is expected to be suitable for ion-implantation device process with large diameter substrates. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | semi-insulating / GaAs / LEC / VB / ion-implantation |
| Paper # | ED98-187,MW98-150,ICD98-254 |
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| Conference Information | |
| Committee | MW |
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| Conference Date | 1999/1/20(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Assistant | |
| Paper Information | |
| Registration To | Microwaves (MW) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Device Characterization of Semi-Insulating GaAs Substrate Grown by Vertical Boat Method for Ion-Implantation Process |
| Sub Title (in English) | |
| Keyword(1) | semi-insulating |
| Keyword(2) | GaAs |
| Keyword(3) | LEC |
| Keyword(4) | VB |
| Keyword(5) | ion-implantation |
| 1st Author's Name | Masaki Yanagisawa |
| 1st Author's Affiliation | Optoelectronics R & D Laboratories, Sumitomo Electric Industries, LTD.() |
| 2nd Author's Name | Shigeru Nakajima |
| 2nd Author's Affiliation | Optoelectronics R & D Laboratories, Sumitomo Electric Industries, LTD. |
| 3rd Author's Name | Takashi Sakurada |
| 3rd Author's Affiliation | Itami Research Laboratories, Sumitomo electric Industries, LTD. |
| 4th Author's Name | Makoto Kiyama |
| 4th Author's Affiliation | Itami Research Laboratories, Sumitomo Electric Industries, LTD. |
| 5th Author's Name | Shin-ichi Sawada |
| 5th Author's Affiliation | Itami Research Laboratories, Sumitomo Electric Industries, LTD. |
| 6th Author's Name | Ryusuke Nakai |
| 6th Author's Affiliation | Semiconductor Division, Sumitomo electric Industries, LTD. |
| Date | 1999/1/20 |
| Paper # | ED98-187,MW98-150,ICD98-254 |
| Volume (vol) | vol.98 |
| Number (no) | 520 |
| Page | pp.pp.- |
| #Pages | 8 |
| Date of Issue | |