| Presentation | 1997/6/13 Fabrication of Polymer Integrated Photonic Circuits Shunsuke Takahashi, Kenichi fujii, Kozo Taguchi, Masahiro Ikeda, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Fabrication technology using dry etching and photo lithography for large scale photonic integrated circuits using polymer material is reported. PMMA and Polyimide are used for the waveguide material. The input/output end was formed by using dry etching process instead of the conventional cleaving or dicing. Both of PMMA and Polyimide are verified to be used as materials for large scale photonic integrated circuits. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Photonic Integrated Circuits / Polymer / Dry Etching / Photo Lithography |
| Paper # | MW97-41 |
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| Conference Information | |
| Committee | MW |
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| Conference Date | 1997/6/13(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Microwaves (MW) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Fabrication of Polymer Integrated Photonic Circuits |
| Sub Title (in English) | |
| Keyword(1) | Photonic Integrated Circuits |
| Keyword(2) | Polymer |
| Keyword(3) | Dry Etching |
| Keyword(4) | Photo Lithography |
| 1st Author's Name | Shunsuke Takahashi |
| 1st Author's Affiliation | Department of Electronics and Electrical Engineering, Fukuyama University() |
| 2nd Author's Name | Kenichi fujii |
| 2nd Author's Affiliation | Department of Electronics and Electrical Engineering, Fukuyama University |
| 3rd Author's Name | Kozo Taguchi |
| 3rd Author's Affiliation | Department of Electronics and Electrical Engineering, Fukuyama University |
| 4th Author's Name | Masahiro Ikeda |
| 4th Author's Affiliation | Department of Electronics and Electrical Engineering, Fukuyama University |
| Date | 1997/6/13 |
| Paper # | MW97-41 |
| Volume (vol) | vol.97 |
| Number (no) | 94 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |