Presentation 2002/9/19
A JFET Device for CMOS Integrated Circuits and Its Application to CMOS-Based Low Noise Amplifiers
Hidekuni Takao, Rikiya Asaoka, Yoshiaki Ito, Kazuaki Sawada, Syoji Kawahito, Makoto Ishida,
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Abstract(in English) In this paper, a fabrication technology of JFET integration in standard CMOS is presented. JFET is used in CMOS (operational) amplifiers for realization of very low-noise sensor interface circuits. JFET devices are formed with "well" structures in standard CMOS circuits. In a p-well region, n-type channel is formed by deep P ion-implantation with energy of 150 keV to connect n+ source and drain region already formed. After that, p-type top gate is formed by B ion-implantation with energy of 30 keV. Fabricated JFET devices showed larger transconductance as compared to MOSFET devices formed on the same die. Noise power-spectrum of fabricated JFET was also evaluated, and very low-level noise amplitude was observed.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) JFET-CMOS / Low-Noise Amplifier / High Input Impedance / Sensor Interface
Paper # ICD2002-80
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Conference Date 2002/9/19(1days)
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Registration To Integrated Circuits and Devices (ICD)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) A JFET Device for CMOS Integrated Circuits and Its Application to CMOS-Based Low Noise Amplifiers
Sub Title (in English)
Keyword(1) JFET-CMOS
Keyword(2) Low-Noise Amplifier
Keyword(3) High Input Impedance
Keyword(4) Sensor Interface
1st Author's Name Hidekuni Takao
1st Author's Affiliation Faculty of Engineering, Toyohashi University of Technology()
2nd Author's Name Rikiya Asaoka
2nd Author's Affiliation Faculty of Engineering, Toyohashi University of Technology
3rd Author's Name Yoshiaki Ito
3rd Author's Affiliation Faculty of Engineering, Toyohashi University of Technology
4th Author's Name Kazuaki Sawada
4th Author's Affiliation Faculty of Engineering, Toyohashi University of Technology
5th Author's Name Syoji Kawahito
5th Author's Affiliation Faculty of Engineering, Toyohashi University of Technology:(Present address)Research Institute of Electronics, Shizuoka University
6th Author's Name Makoto Ishida
6th Author's Affiliation Faculty of Engineering, Toyohashi University of Technology
Date 2002/9/19
Paper # ICD2002-80
Volume (vol) vol.102
Number (no) 339
Page pp.pp.-
#Pages 6
Date of Issue