| Presentation | 2001/12/14 Embedded TiNxOy Thin-Film Resistors in a Build-up CSP for 10 Gbps Optical Transmitter and Receiver Modules Akinobu SHIBUYA, Koji MATSUI, Kazufumi TAKAHASHI, Atsuhiro KAWATANI, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We have developed new TiNxOy thin-film resistors, as well as a termination resistor-embedded CSP, and a process for fabricating integral passive components. Our TiNxOy films exhibit a sheet resisitivity in the range of 30-5kΩ/square. To keep costs low, we have made the fabrication process compatible with that for MCM-D/L. The Chip Scale Package(CSP)with embedded resistors has been designed for 10 Gbps optical transmitter and receiver modules. The CSP has a Cu conductor of 52 μm width. The resistors have a 130 μm length corresponding to the line spacing and 90 μm width. A fabricated version shows excellent return loss for its termination resistor at 10 GHz. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | titanium nitride / thin-film / resistor / build-up / integral passive component / CSP |
| Paper # | CPM-124,ICD-176 |
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| Conference Information | |
| Committee | ICD |
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| Conference Date | 2001/12/14(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
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| Paper Information | |
| Registration To | Integrated Circuits and Devices (ICD) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Embedded TiNxOy Thin-Film Resistors in a Build-up CSP for 10 Gbps Optical Transmitter and Receiver Modules |
| Sub Title (in English) | |
| Keyword(1) | titanium nitride |
| Keyword(2) | thin-film |
| Keyword(3) | resistor |
| Keyword(4) | build-up |
| Keyword(5) | integral passive component |
| Keyword(6) | CSP |
| 1st Author's Name | Akinobu SHIBUYA |
| 1st Author's Affiliation | Functional Materials Research Laboratories, NEC Corporation() |
| 2nd Author's Name | Koji MATSUI |
| 2nd Author's Affiliation | Functional Materials Research Laboratories, NEC Corporation |
| 3rd Author's Name | Kazufumi TAKAHASHI |
| 3rd Author's Affiliation | Fiber Optic Devices Division, NEC Corporation |
| 4th Author's Name | Atsuhiro KAWATANI |
| 4th Author's Affiliation | Fiber Optic Devices Division, NEC Corporation |
| Date | 2001/12/14 |
| Paper # | CPM-124,ICD-176 |
| Volume (vol) | vol.101 |
| Number (no) | 519 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |