| Presentation | 2000/12/1 Novel nondestructive and non-contact chip inspection and analysis technique : Scanning laser-SQUID microscopy K. Nikawa, S. Inoue, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We have developed a novel inspection/analysis technique that can localize electrical defects such as short gates and open line. Basic idea of the technique is a detection of magnetic field produced by laser-beam-induced current. High T_cDC-SQUIDs are used to detect magnetic field. The spatial resolution has been demonstrated to be better than 1.3 um. This shows that this method is applicable to the inspection and analysis on LSI chips. The demonstration simulated the fault localization on a bare chip mounted on a board. How to apply this method to other types of failure analysis. inspection and process monitoring was proposed. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | SQUID / magnetic field / laser beam / OBIC / short defects / open defects / p-n junctions |
| Paper # | CPM2000-141,ICD2000-174 |
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| Conference Information | |
| Committee | ICD |
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| Conference Date | 2000/12/1(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
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| Paper Information | |
| Registration To | Integrated Circuits and Devices (ICD) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Novel nondestructive and non-contact chip inspection and analysis technique : Scanning laser-SQUID microscopy |
| Sub Title (in English) | |
| Keyword(1) | SQUID |
| Keyword(2) | magnetic field |
| Keyword(3) | laser beam |
| Keyword(4) | OBIC |
| Keyword(5) | short defects |
| Keyword(6) | open defects |
| Keyword(7) | p-n junctions |
| 1st Author's Name | K. Nikawa |
| 1st Author's Affiliation | NEC Corporation() |
| 2nd Author's Name | S. Inoue |
| 2nd Author's Affiliation | T.D.I.Co.Ltd. |
| Date | 2000/12/1 |
| Paper # | CPM2000-141,ICD2000-174 |
| Volume (vol) | vol.100 |
| Number (no) | 488 |
| Page | pp.pp.- |
| #Pages | 8 |
| Date of Issue | |