Presentation 2000/1/21
Variable Threshold Filed-Effect-Transistor with Paired Gates Fabricated by Using the Wafer-Bonding Techniqe
Satoshi KODAMA, Tomofumi FURUTA, Hiroshi ITO, Noriyuki WATANABE, Atsushi KANDA, Masahiro MURAGUCHI, Tadao ISHIBASHI,
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Abstract(in English) We investigated a novel heterostructure field-effect transistor (HFET) with paired gates (PGs), where one gate is above and the other below the channel. Using the wafer-bonding technique, we succeeded in fabricating AlGaAs/InGaAs PG-HFETs on a 3-inch-diameter wafer. The static characteristics of the fabricated HFET indicate that the drain current (I_D) is controlled by the paired gates, providing maximum transconductance of 240 mS/mm. Since the drain current can be controlled by each gate voltage independently, the PG-HFET accepts two gate input signals and functions as a variable threshold HFET. PG-FETs have the unique feature of variable threshold voltage, higher transconductance, lower drain-source capacitance and better subthreshold characteristics. Thus, they will be valuable in creating a new class of microwave and digital circuits.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) wafer-bonding / variable threshold voltage / two-gate-input / HFET / InGaAs
Paper # ED99-279,MW99-203,ICD99-254
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Conference Date 2000/1/21(1days)
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Registration To Integrated Circuits and Devices (ICD)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Variable Threshold Filed-Effect-Transistor with Paired Gates Fabricated by Using the Wafer-Bonding Techniqe
Sub Title (in English)
Keyword(1) wafer-bonding
Keyword(2) variable threshold voltage
Keyword(3) two-gate-input
Keyword(4) HFET
Keyword(5) InGaAs
1st Author's Name Satoshi KODAMA
1st Author's Affiliation NTT Phtonics Labs.()
2nd Author's Name Tomofumi FURUTA
2nd Author's Affiliation NTT Phtonics Labs.
3rd Author's Name Hiroshi ITO
3rd Author's Affiliation NTT Phtonics Labs.
4th Author's Name Noriyuki WATANABE
4th Author's Affiliation NTT Phtonics Labs.
5th Author's Name Atsushi KANDA
5th Author's Affiliation NTT Phtonics Labs.
6th Author's Name Masahiro MURAGUCHI
6th Author's Affiliation NTT Electronics Corporation
7th Author's Name Tadao ISHIBASHI
7th Author's Affiliation NTT Phtonics Labs.
Date 2000/1/21
Paper # ED99-279,MW99-203,ICD99-254
Volume (vol) vol.99
Number (no) 561
Page pp.pp.-
#Pages 6
Date of Issue