| Presentation | 1999/8/26 Suppression of self-interstitial diffusion due to carbon Hiroyuki Kobayashi, Ryangsu Kim, Jianxin Xia, Tomoya Saito, Yosinari Kamakura, Kenji Taniguchi, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | In order to clarify the interaction between carbon and interstitial silicon atoms, we,investigate the transient enhanced deffusion of boron atoms in boron-doped superlattice wafers containing different carbon concentrations. We found that the effectibe diffusivith of interstitial silicon is in inverse proportion to the square of carbon concentration, which indicates the effects of the complex containing two carbon atoms. We perform abinitio calculations of the total energy of various configurations containing two carbon atoms; it is shown that the carbon cluster strongly suppress the effective diffusivity of interstitial silicon. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Carbon / interstitial / ab-initio / boron / TED |
| Paper # | ICD99-134 |
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| Conference Information | |
| Committee | ICD |
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| Conference Date | 1999/8/26(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Integrated Circuits and Devices (ICD) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Suppression of self-interstitial diffusion due to carbon |
| Sub Title (in English) | |
| Keyword(1) | Carbon |
| Keyword(2) | interstitial |
| Keyword(3) | ab-initio |
| Keyword(4) | boron |
| Keyword(5) | TED |
| 1st Author's Name | Hiroyuki Kobayashi |
| 1st Author's Affiliation | Department of Electronics and Information Systems, Graduate School of Engineering, Osaka Univ.() |
| 2nd Author's Name | Ryangsu Kim |
| 2nd Author's Affiliation | Department of Electronics and Information Systems, Graduate School of Engineering, Osaka Univ. |
| 3rd Author's Name | Jianxin Xia |
| 3rd Author's Affiliation | Department of Electronics and Information Systems, Graduate School of Engineering, Osaka Univ. |
| 4th Author's Name | Tomoya Saito |
| 4th Author's Affiliation | Department of Electronics and Information Systems, Graduate School of Engineering, Osaka Univ. |
| 5th Author's Name | Yosinari Kamakura |
| 5th Author's Affiliation | Department of Electronics and Information Systems, Graduate School of Engineering, Osaka Univ. |
| 6th Author's Name | Kenji Taniguchi |
| 6th Author's Affiliation | Department of Electronics and Information Systems, Graduate School of Engineering, Osaka Univ. |
| Date | 1999/8/26 |
| Paper # | ICD99-134 |
| Volume (vol) | vol.99 |
| Number (no) | 265 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |