Presentation | 1999/8/26 Simulation of FN Tunneling Currents Including Realistic Structure of Gate Electrode K. Matsuzawa, H. Hazama, H. Tanimoto, |
---|---|
PDF Download Page | PDF download Page Link |
Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | Probability of FN tunneling was calculated by detecting tunneling path between each point in gate oxide and gate electrode, based on parabolic shape potential and the WKB approximation. For a realistic gate structure of a MOSFET, simulation results by the present approach were smaller than those by the constant field model, which was due to non-uniform distribution of electric field in the gate oxide. Moreover, using the present approach, detail distribtttion of carriers generated by the FN tunneling in the gate oxide is demonstrated. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | FN tunneling / simulatnon |
Paper # | ICD99-129 |
Date of Issue |
Conference Information | |
Committee | ICD |
---|---|
Conference Date | 1999/8/26(1days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | |
Topics (in Japanese) | (See Japanese page) |
Topics (in English) | |
Chair | |
Vice Chair | |
Secretary | |
Assistant |
Paper Information | |
Registration To | Integrated Circuits and Devices (ICD) |
---|---|
Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Simulation of FN Tunneling Currents Including Realistic Structure of Gate Electrode |
Sub Title (in English) | |
Keyword(1) | FN tunneling |
Keyword(2) | simulatnon |
1st Author's Name | K. Matsuzawa |
1st Author's Affiliation | Advanced LSI Technology Laboratory, Toshiba Corporation() |
2nd Author's Name | H. Hazama |
2nd Author's Affiliation | Microelectronics Engineering Laboratory, Toshiba Corporation |
3rd Author's Name | H. Tanimoto |
3rd Author's Affiliation | |
Date | 1999/8/26 |
Paper # | ICD99-129 |
Volume (vol) | vol.99 |
Number (no) | 265 |
Page | pp.pp.- |
#Pages | 6 |
Date of Issue |