Presentation 1999/8/26
An Efficient Method for Monte Carlo Ion Implantation Simulation
takahisa kanemura,
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Abstract(in English) An efficient trajectory split method for monte carlo ion implantation simulation is presented. This method permits users specify the lower limit of calculated concentration, instead of the splitting number. It is convenient for semiconductor device designers. In addition, since the split in high concentration region is suppressed, the calculation time is efficiently reduced. This method was implemented to the in-house ID and 2D simulator, and the required time was 1/100-1/1000, compared with non spliting case.
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Keyword(in English) Monte Carlo / Jon Implantation Simulation / Statistical Noise / Trajectory Split Method
Paper # ICD99-128
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Committee ICD
Conference Date 1999/8/26(1days)
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Paper Information
Registration To Integrated Circuits and Devices (ICD)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) An Efficient Method for Monte Carlo Ion Implantation Simulation
Sub Title (in English)
Keyword(1) Monte Carlo
Keyword(2) Jon Implantation Simulation
Keyword(3) Statistical Noise
Keyword(4) Trajectory Split Method
1st Author's Name takahisa kanemura
1st Author's Affiliation Microelectronics Engineering Laboratory TOSHIBA Corporation Semiconductor Company()
Date 1999/8/26
Paper # ICD99-128
Volume (vol) vol.99
Number (no) 265
Page pp.pp.-
#Pages 8
Date of Issue