Presentation	1999/7/23 ASET Activities on the Semiconductor Research 1999 Hideo Setoya,
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Abstract(in English)	The Association of Super-Advanced Electronics Technologies (ASET) is a research consortium founded in 1996 to promote R & D studies of advanced electronics technologies for the next next generation. Since then by the contract with New Energy and Industrial Technology Development Organization (NEDO), ASET has carried out R & D research on semiconductor magnetic storage and liquid crystal. ASET semiconductor research include lithography, plasma diagnostics and cleaning technology in the first place. The lithography activity has covered EB writers, ArF lithography and Proximity Xray lithography for 3 years. Last year ASET initiated the study of Extreme Ultra Violet (EUV) lithography technology. ASET will also start Alternative Technology for Perfuluoro Compound which are widely used for etching process and Advanced Packaging Technology projects.
Keyword(in Japanese)	(See Japanese page)
Keyword(in English)	Lithography / Etching / Packaging
Paper #	ED99-143
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Conference Information
Committee	ICD
Conference Date	1999/7/23(1days)
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Place (in English)
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Topics (in English)
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Paper Information
Registration To	Integrated Circuits and Devices (ICD)
Language	ENG
Title (in Japanese)	(See Japanese page)
Sub Title (in Japanese)	(See Japanese page)
Title (in English)	ASET Activities on the Semiconductor Research 1999
Sub Title (in English)
Keyword(1)	Lithography
Keyword(2)	Etching
Keyword(3)	Packaging
1st Author's Name	Hideo Setoya
1st Author's Affiliation	ASET (Association of Super-Advanced Electronics Technologies)()
Date	1999/7/23
Paper #	ED99-143
Volume (vol)	vol.99
Number (no)	234
Page	pp.pp.-
#Pages	5
Date of Issue